Image sensor including one or more microlenses provided within a metallization layer
A image sensor includes a semiconductor substrate with a photosensitive region. Metallization layers are stacked over the semiconductor substrate. Each metallization layer includes an etch stop layer and a dielectric layer on the etch stop layer. At least one metallization layer includes one or more microlenses positioned over the photosensitive region. The one or more microlenses are integrally formed by the etch stop layer.
1. An image sensor, comprising:
a semiconductor substrate including a photosensitive region;
a plurality of metallization layers stacked over the semiconductor substrate, wherein each metallization layer includes an etch stop layer and a dielectric layer on said etch stop layer; and
wherein at least one metallization layer of said plurality of metallization layers includes at least one microlens positioned over the photosensitive region, said at least one microlens being integrally formed by the etch stop layer; and
wherein said at least one microlens has a convex shape with a convex surface oriented to face away from the photosensitive region; and
wherein the etch stop layer of another metallization layer of said plurality of metallization layers, said another metallization layer being located further away from the semiconductor substrate than said at least one metallization layer, is positioned to extend over said at least one microlens such that light directed by the at least one microlens to the photosensitive region passes through the etch stop layer of said another metallization layer.
2. The image sensor of claim 1 , wherein an index of refraction of the etch stop layer is less than an index of refraction of the dielectric layer.
3. The image sensor of claim 1 , wherein an index of refraction of the etch stop layer is greater than an index of refraction of the dielectric layer.
4. The image sensor of claim 1 , wherein said at least one metallization layer that includes the integrally formed microlens further includes a metal wiring structure.
5. The image sensor of claim 4 , wherein said at least one metallization layer that includes the integrally formed microlens further includes a metal via in electrical contact with the metal wiring structure.
6. An image sensor, comprising:
a semiconductor substrate including a photosensitive region;
a plurality of metallization layers stacked over the semiconductor substrate, wherein each metallization layer includes an etch stop layer and a dielectric layer on said etch stop layer; and
wherein at least one metallization layer of said plurality of metallization layers includes at least one microlens positioned over the photosensitive region, said at least one microlens being integrally formed by the etch stop layer; and
wherein the dielectric layer of said at least one metallization layer which includes the at least one microlens comprises a first dielectric layer on the etch stop layer and said at least one microlens, a second dielectric layer in contact with the first dielectric layer; and
wherein said at least one metallization layer which includes the at least one microlens comprises a metal wiring structure extending through the first dielectric layer and a metal via structure extending through the second dielectric layer to contact the metal wiring structure.
7. The image sensor of claim 6 , wherein an index of refraction of the etch stop layer is less than an index of refraction of the dielectric layer.
8. The image sensor of claim 6 , wherein an index of refraction of the etch stop layer is greater than an index of refraction of the dielectric layer.
9. The image sensor of claim 6 , wherein said at least one microlens has a convex shape.