Composition for forming liquid immersion upper layer film, and polymer
An immersion upper layer film-forming composition includes [A] a polymer component that includes a polymer (A1), and [B] a solvent, the polymer (A1) including a structural unit (I) that includes a group represented by the following formula (i). The structural unit (I) is preferably a structural unit (I-1) represented by the following formula (1). The polymer component [A] preferably further includes a structural unit (II-1) represented by the following formula (2), the structural unit (II-1) being included in the polymer (A1) or a polymer other than the polymer (A1). The polymer component [A] preferably further includes a structural unit (III) that includes a carboxyl group, the structural unit (III) being included in the polymer (A1) or a polymer other than the polymer (A1).
1. An immersion upper layer film-forming composition comprising:
[A] a polymer component that comprises:
a structural unit (I-1) represented by formula (1), the structural unit (I-1) being included in a polymer (A1);
a structural unit (II-1-2) represented by formula (2-2); and
optionally a structural unit (II-1-1) represented by formula (2-1), the structural unit (II-1-1) and the structural unit (II-1-2) being included in the polymer (A1) or a polymer other than the polymer (A1); and
[B] a solvent,
wherein a content of the structural unit (I-1) in the polymer component [A] is from 0.5 to 50 mol % based on total structural units included in the polymer component [A],
wherein
R 1 is a hydrogen atom,
R 2 is —C(═O)—R 3f , —S(═O) 2 —R 4 , or —R 6 —NO 2 , wherein R 3f is a fluoroalkyl group, R 4 is a hydrogen atom, an alkyl group, a fluoroalkyl group, a monovalent alicyclic hydrocarbon group, an alkoxy group, a cyano group, a cyanomethyl group, an aralkyl group, or an aryl group, or R 4 and R 1 taken together represent a cyclic structure, and R 6 is a single bond, a methylene group, or an alkylene group having 2 to 5 carbon atoms,
n is an integer from 1 to 3, in a case where R 1 is present in a plurality of number, the plurality of R 1 s are each identical or different, and in a case where R 2 is present in a plurality of number, the plurality of R 2 s are each identical or different,
L 1 is an (n+1)-valent linking group, and
R is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group,
wherein R′ is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group, R f1 is a divalent linking group, and R f2 is a linear or branched monovalent fluorohydrocarbon group having 2 to 8 carbon atoms or a monovalent alicyclic fluorohydrocarbon group having 4 to 8 carbon atoms.
2. The immersion upper layer film-forming composition according to claim 1 , wherein the polymer component [A] further comprises a structural unit (III) that comprises a carboxyl group, the structural unit (III) being included in the polymer (A1) or a polymer other than the polymer (A1).
3. The immersion upper layer film-forming composition according to claim 1 , wherein the polymer component [A] further comprises a structural unit (IV) that comprises a sulfo group, the structural unit (IV) being included in the polymer (A1) or a polymer other than the polymer (A1).
4. The immersion upper layer film-forming composition according to claim 1 , wherein the solvent [B] comprises an ether solvent.
5. The immersion upper layer film-forming composition according to claim 1 , wherein the content of the structural unit (I-1) in the polymer component [A] is from 1 to 45 mol % based on total structural units included in the polymer component [A].
6. The immersion upper layer film-forming composition according to claim 1 , wherein the content of the structural unit (I-1) in the polymer component [A] is from 3 to 40 mol % based on total structural units included in the polymer component [A].
7. The immersion upper layer film-forming composition according to claim 1 , wherein a total content of the structural unit (II-1-1) and the structural unit (II-1-2) in the polymer component [A] is from 10 to 99 mol % based on total structural units included in the polymer component [A].
8. The immersion upper layer film-forming composition according to claim 1 , wherein a total content of the structural unit (II-1-1) and the structural unit (II-1-2) in the polymer component [A] is from 20 to 97 mol % based on total structural units included in the polymer component [A].
9. A polymer comprising:
a structural unit (I-1) represented by formula (1);
a structural unit (II-1-2) represented by formula (2-2); and
optionally a structural unit (II-1-1) represented by formula (2-1),
wherein a content of the structural unit (I-1) in the polymer is from 0.5 to 50 mol % based on total structural units included in the polymer,
wherein R 1 is a hydrogen atom, R 2 is —C(═O)—R 3f , —S(═O) 2 —R 4 , or —R 6 —NO 2 , wherein R 3f is a fluoroalkyl group, R 4 is a hydrogen atom, an alkyl group, a fluoroalkyl group, a monovalent alicyclic hydrocarbon group, an alkoxy group, a cyano group, a cyanomethyl group, an aralkyl group, or an aryl group, or R 4 and R 1 taken together represent a cyclic structure, and R 6 is a single bond, a methylene group, or an alkylene group having 2 to 5 carbon atoms, n is an integer from 1 to 3, in a case where R 1 is present in a plurality of number, the plurality of R 1 s are each identical or different, and in a case where R 2 is present in a plurality of number, the plurality of R 2 s are each identical or different, L 1 is an (n+1)-valent linking group, and R is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group,
wherein R′ is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group, R f1 is a divalent linking group, and R f2 is a linear or branched monovalent fluorohydrocarbon group having 2 to 8 carbon atoms or a monovalent alicyclic fluorohydrocarbon group having 4 to 8 carbon atoms.
10. The polymer according to claim 9 , further comprising a structural unit (III) that comprises a carboxyl group.
11. The polymer according to claim 9 , further comprising a structural unit (IV) that comprises a sulfo group.
12. The polymer according to claim 9 , wherein the content of the structural unit (I-1) in the polymer is from 1 to 45 mol % based on total structural units included in the polymer.
13. The polymer according to claim 9 , wherein the content of the structural unit (I-1) in the polymer is from 3 to 40 mol % based on total structural units included in the polymer.
14. The polymer according to claim 9 , wherein a total content of the structural unit (II-1-1) and the structural unit (II-1-2) in the polymer is from 10 to 99 mol % based on total structural units included in the polymer.
15. The polymer according to claim 9 , wherein a total content of the structural unit (II-1-1) and the structural unit (II-1-2) in the polymer is from 20 to 97 mol % based on total structural units included in the polymer.