IP Library › Granted Patent US 10,283,342
Granted Patent B2
US 10,283,342 · App. 15/360,397 · Granted May 7, 2019

Laser sustained plasma light source with graded absorption features

Inventors: Ilya Bezel (Mountain View, CA); Anatoly Shchemelinin (Bozeman, MT); Kenneth P. Gross (San Carlos, CA); Matthew Panzer (San Jose, CA); Anant Chimmalgi (San Jose, CA); Lauren Wilson (San Jose, CA); Joshua Wittenberg (Fremont, CA)
Assignee: KLA-Tencor Corporation
H01J61/025H01J61/302H01J61/52H01J65/04
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Quick Facts
Patent No.
US 10,283,342
App. No.
15/360,397
Granted
May 7, 2019
Kind
B2
Abstract

A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.

Claims (53)

1. A laser-sustained plasma lamp comprising:

a gas containment structure configured to contain a volume of gas, the gas containment structure configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas, wherein the plasma emits broadband radiation, the gas containment structure including one or more transmissive structures being at least partially transparent to at least a portion of the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma, wherein the one or more transmissive structures include a predetermined graded absorption profile to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma to establish a selected thermal distribution of the one or more transmissive structures.

2. The plasma lamp of claim 1 , wherein the predetermined graded absorption profile corresponds to the intensity profile of the broadband radiation impinging on the one or more transmissive structures.

3. The plasma lamp of claim 1 , wherein the predetermined graded absorption profile includes minimum absorptivity of at least a portion of the broadband radiation at a portion of the one or more transmissive structures receiving a maximum intensity of the broadband radiation.

4. The plasma lamp of claim 1 , wherein the predetermined graded absorption profile includes maximum absorptivity of at least a portion of the broadband radiation at a portion of the one or more transmissive structures receiving a minimum intensity of the broadband radiation.

5. The plasma lamp of claim 1 , wherein the predetermined graded absorption profile includes a maximum absorptivity at one or more end portions of the gas containment structure and a minimum absorptivity at an equatorial portion of the gas containment structure.

6. The plasma lamp of claim 1 , wherein the predetermined graded absorption profile includes a continuous change in absorptivity along one or more directions of the one or more transmissive structures.

7. The plasma lamp of claim 1 , wherein the one or more transmissive structures comprise:

one or more transmission elements; and

one or more graded absorption layers disposed on one or more surfaces of the one or more transmission elements, wherein the absorptivity of the one or more graded absorption layers varies as a function of position along the one or more transmission elements.

8. The plasma lamp of claim 7 , wherein the one or more surfaces of the one or more transmission elements comprise:

at least one of an internal surface or an external surface.

9. The plasma lamp of claim 7 , wherein the one or more predetermined graded absorption layers are formed from at least one of aluminum, carbon or hafnium.

10. The plasma lamp of claim 1 , wherein the one or more transmissive structures comprise:

one or more transmission elements doped with one or more absorbing materials such that the absorptivity of the one or more transmission transparent elements is a function of position along the one or more transmission elements.

11. The plasma lamp of claim 10 , wherein the one or more absorbing materials comprise at least one of aluminum, carbon or hafnium.

12. The plasma lamp of claim 10 , wherein the one or more absorbing materials comprise an absorbing material for absorbing non-usable broadband radiation.

13. The plasma lamp light source of claim 1 , wherein the one or more transmissive structures comprise at least one of a transparent or semi-transparent wall of a plasma bulb.

14. The plasma lamp light source of claim 1 , wherein the one or more transmissive structures comprise at least one of a transparent or semi-transparent wall of a plasma cell.

15. The plasma lamplight source of claim 1 , wherein the one or more transmissive structures comprise one or more windows of a plasma chamber.

16. The plasma lamplight source of claim 1 , wherein the one or more transmissive structures include at least one of calcium fluoride, magnesium fluoride, lithium fluoride, crystalline quartz, sapphire or fused silica.

17. The plasma lamplight source of claim 1 , wherein the gas comprises:

at least one of an inert gas, a non-inert gas and a mixture of two or more gases.

18. An optical device comprising:

an optical component including at least one of a reflective element or a transmission element; and

one or more graded absorption layers disposed on one or more surfaces of at least one of the reflective element or the transmission element, wherein the one or more graded absorption layers establish a predetermined graded absorption profile to control heating of at least one of the reflective element or the transmission element caused by the broadband radiation emitted by a plasma to establish a selected thermal distribution of the one or more transmissive structures.

19. The optical device plasma lamp of claim 18 , wherein the predetermined graded absorption profile corresponds to the intensity profile of the broadband radiation impinging on at least one of the reflective element or the transmission element.

20. The optical device plasma lamp of claim 18 , wherein the predetermined graded absorption profile includes minimum absorptivity of at least a portion of the broadband radiation at a portion of at least one of the reflective element or the transmission element receiving a maximum intensity of the broadband radiation.

21. The optical device plasma lamp of claim 18 , wherein the predetermined graded absorption profile includes maximum absorptivity of at least a portion of the broadband radiation at a portion of at least one of the reflective element or the transmission element receiving a minimum intensity of the broadband radiation.

22. The optical device plasma lamp of claim 18 , wherein the predetermined graded absorption profile includes a continuous change in absorptivity along one or more directions of at least one of the reflective element or the transmission element.

23. The optical device plasma lamp of claim 22 , wherein the one or more surfaces of the one or more transmission elements comprise:

at least one of an internal surface or an external surface.

24. The optical device plasma lamp of claim 18 , wherein the one or more predetermined graded absorption layers is formed from at least one of aluminum, carbon or hafnium.

25. The optical device plasma lamp of claim 18 , wherein the one or more absorbing materials comprises an absorbing material for absorbing non-usable broadband radiation.

26. The optical device light source of claim 18 , wherein the transmission element comprises at least one of a plasma bulb, a plasma cell, a window of a plasma chamber, a lens or a beam splitter.

27. The optical device light source of claim 18 , wherein the reflective element comprises at least one of mirror or a beam splitter.

28. A system for generating broadband laser-sustained plasma light comprising:

one or more pump lasers configured to generate illumination;

a plasma lamp, wherein the plasma lamp includes a gas containment structure configured to contain a volume of gas, the gas containment structure configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas, wherein the plasma emits broadband radiation, the gas containment structure including one or more transmissive structures being at least partially transparent to at least a portion of the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma, wherein the one or more transmissive structures include a predetermined graded absorption profile to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma to establish a selected thermal distribution of the one or more transmissive structures; and

one or more lamp optics arranged to focus the illumination from the one or more pump lasers into the volume of gas in order to generate a plasma within the volume of gas contained within the plasma lamp.

29. The system of claim 28 , wherein the one or more lamp optics are arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and direct the broadband radiation to one or more additional optical elements.

30. The system of claim 28 , wherein the one or more lamp optics comprise:

an ellipsoid-shaped collector element.

31. The system of claim 28 , wherein the one or more pump lasers comprise:

one or more infrared lasers.

32. The system of claim 28 , wherein the one or more pump lasers comprise:

a continuous wave laser.

33. The system of claim 28 , wherein the one or more pump lasers comprise:

a pulsed laser.

34. The system of claim 28 , wherein the one or more pump lasers comprise:

a modulated laser.

35. The system of claim 28 , wherein the gas comprises:

at least one of an inert gas, a non-inert gas and a mixture of two or more gases.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 18, 2017
From: BEZEL, ILYA; SHCHEMELININ, ANATOLY; GROSS, KENNETH P.; PANZER, MATTHEW; CHIMMALGI, ANANT; WILSON, LAUREN; WITTENBERG, JOSHUA
To: KLA-TENCOR CORPORATION
Reel/Frame 042040/0839 →
Continuity (2)
Provisional Application 62263663 · Dec 6, 2015
Related Publication 20170164457A1 · Jun 8, 2017