Integrated circuit nanoparticle thermal routing structure in interconnect region
An integrated circuit has a substrate and an interconnect region disposed on the substrate. The interconnect region has a plurality of interconnect levels. The integrated circuit includes a thermal routing structure in the interconnect region. The thermal routing structure extends over a portion, but not all, of the integrated circuit in the interconnect region. The thermal routing structure includes a cohered nanoparticle film in which adjacent nanoparticles cohere to each other. The thermal routing structure has a thermal conductivity higher than dielectric material touching the thermal routing structure. The cohered nanoparticle film is formed by a method which includes an additive process.
1. An integrated circuit, comprising:
a substrate comprising a semiconductor material and a heat-generating component;
an interconnect region above the substrate, the interconnect region comprising a dielectric layer stack comprising dielectric material and contacts disposed in the dielectric layer stack;
a thermal routing structure contacting the dielectric material, the thermal routing structure thermally coupled to the heat-generating component, the thermal routing structure includes a cohered nanoparticle film comprising nanoparticles and inorganic molecules, a graphitic material adjacent to a portion of the cohered nanoparticle film, and a thermal conductivity of the thermal routing structure is higher than a thermal conductivity of dielectric material contacting the thermal routing structure; and
a dielectric isolation layer adjacent to the thermal routing structure, the dielectric isolation layer comprising electrically non-conductive nanoparticles having a high thermal routing structure, and the dielectric isolation layer electrically isolating electricity of the contacts from the thermal routing structure.
2. The integrated circuit of claim 1 , wherein the cohered nanoparticle film comprises electrically non-conductive nanoparticles of a material selected from the group consisting of aluminum oxide, diamond, hexagonal boron nitride, cubic boron nitride, and aluminum nitride.
3. The integrated circuit of claim 2 , wherein the interconnect region comprises vias electrically coupled to the contacts and at least one of the vias touches the dielectric isolation layer.
4. The integrated circuit of claim 1 , wherein the cohered nanoparticle film comprises electrically conductive nanoparticles of a material selected from the group consisting of metal, graphene, graphene embedded in metal, graphite, graphitic carbon, and/or carbon nanotubes.
5. The integrated circuit of claim 1 , wherein the cohered nanoparticle film comprises nanoparticles of a metal selected from the group consisting of copper, nickel, palladium, platinum, iridium, rhodium, cerium, osmium, molybdenum, and gold, and wherein the thermal routing structure comprises a layer of graphitic material disposed on the cohered nanoparticle film.
6. The integrated circuit of claim 1 , wherein the thermal routing structure extends to a heat removal region of the integrated circuit.
7. The integrated circuit of claim 1 , wherein the thermal routing structure extends away from a thermally sensitive component of the integrated circuit.
8. The integrated circuit of claim 1 , wherein the thermal routing structure extends over matching components of the integrated circuit.
9. The integrated circuit of claim 1 , wherein the dielectric isolation layer is formed over an instant top surface of the interconnect region and beneath the thermal routing structure, so that no interconnects of the interconnect region contact the thermal routing structure.
10. The integrated circuit of claim 1 , further comprising a thermal routing component selected from the group consisting of a deep trench thermal routing structure, a high thermal conductivity via, a top level thermal conductivity structure, a high thermal conductivity through-package conduit, and a graphitic via;
wherein:
the deep trench thermal routing structure comprises a cohered nanoparticle film, the deep trench thermal routing structure being disposed in the substrate and extending to the boundary between the substrate and the interconnect region;
the high thermal conductivity via comprises a cohered nanoparticle film, the high thermal conductivity via being disposed above the interconnect region;
the top level thermal conductivity structure comprises a cohered nanoparticle film, the top level thermal conductivity structure being disposed above the interconnect region;
the high thermal conductivity through-package conduit comprises a cohered nanoparticle film, the high thermal conductivity through-package conduit being disposed through an encapsulation material over the integrated circuit and extending to the integrated circuit; and
the graphitic via comprises a cohered nanoparticle film, the graphitic via being electrically coupled to one of a plurality of components of the integrated circuit.
11. The integrated circuit of claim 1 , wherein adjacent nanoparticles in the cohered nanoparticle film cohere to each other.
12. The integrated circuit of claim 11 , wherein the cohered nanoparticle film is substantially free of an organic binder material.
13. The integrated circuit of claim 1 , wherein the thermal routing structure is electrically non-conductive.