Piezoelectric component and method for producing a piezoelectric component
A method for producing a piezoelectric component is disclosed. In an embodiment, the method includes producing a ceramic precursor material of the general formula Pb 1-x-y-(2a-b)/2 V (2a-b)/2 ″Ba x Sr y [(Ti z Zr 1-z ) 1-a-b W a RE b ]O 3 , where RE is a rare earth metal and V″ is a Pb vacancy, mixing the ceramic precursor material with a sintering aid, forming a stack which includes alternating layers including the ceramic precursor material and a layer including Cu and debindering and sintering the stack thereby forming the piezoelectric component having Cu electrodes and at least one piezoelectric ceramic layer including Pb 1-x-y-[(2a-b)/2]-p/2 V [(2a-b)/2-p/2] ″Cu p Ba x Sr y [(Ti z Zr 1-z ) 1-a-b W a RE b ]O 3 , where 0≤x≤0.035, 0≤y≤0.025, 0.42≤z≤0.5, 0.0045≤a≤0.009, 0.009≤b≤0.011, and 2a>b, p≤2a−b.
1. A method for producing a piezoelectric component, the method comprising:
producing a ceramic precursor material of the general formula Pb 1-x-y-(2a-b)/2 V (2a-b)/2 ″Ba x Sr y [(Ti z Zr 1-z ) 1-a-b W a RE b ]O 3 , where RE is a rare earth metal and V″ is a Pb vacancy;
mixing the ceramic precursor material with a sintering aid;
forming a stack which includes alternating layers comprising the ceramic precursor material and a layer comprising Cu; and
debindering and sintering the stack thereby forming the piezoelectric component having Cu electrodes and at least one piezoelectric ceramic layer comprising Pb 1-x-y-[(2a-b)/2]-p/2 V [(2a-b)/2-p/2] ″Cu p Ba x Sr y [(Ti z Zr 1-z ) 1-a-b W a RE b ]O 3 , where 0≤x≤0.035, 0≤y≤0.025, 0.42≤z≤0.5, 0.0045≤a≤0.009, 0.009≤b≤0.011, and 2a>b, p≤2a-b.
2. The method according to claim 1 , wherein producing the ceramic precursor material comprises:
providing a mixture of starting materials, the mixture of starting materials are selected from the group consisting of Pb 3 O 4 , TiO 2 , ZrO 2 , WO 3 , RE 2 O 3 , BaCO 3 and SrCO 3 ;
calcining the mixture at a first temperature and milling the mixture to a first average diameter; and
calcining the mixture at a second temperature that is higher than the first temperature.
3. The method according to claim 2 , wherein the mixture obtained by mixing the ceramic precursor material with the sintering aid is milled to a second average diameter that is smaller than the first average diameter.
4. The method according to claim 3 , wherein the mixture obtained by mixing the ceramic precursor material with the sintering aid further comprises adding Cu 2 O with a fraction of 0.05 to 0.1 mol %.
5. The method according to claim 1 , wherein mixing the ceramic precursor material comprises adding PbO or Pb 3 O 4 as the sintering aid, a fraction selected for the sintering aid being between 0.5 and 3 mol %, based on 1 mol of ceramic precursor material.
6. The method according to claim 1 , wherein forming the stack comprises applying Cu to the layer comprising the ceramic precursor material by sputter-coating with Cu or printing with a Cu paste.
7. The method according to claim 1 , wherein debindering the stack takes place under steam with exclusion of oxygen.
8. The method according to claim 1 , wherein sintering the stack takes place at an oxygen partial pressure which lies between an equilibrium partial pressure of PbO/Pb and an equilibrium partial pressure of Cu/Cu 2 O.
9. The method according to claim 8 , wherein the oxygen partial pressure is set by a mixture of steam and forming gas.
10. The method according to claim 1 , wherein sintering takes place at a temperature between 1000° C. and 1050° C.
11. The method according to claim 1 , wherein x=0.0295, y=0.0211, z=0.475, a=0.00753, b=0.0095, and RE=Yb are selected, and wherein debindering and sintering the stack comprises producing a piezoelectric ceramic layer comprising Pb 0.945 V 0.00128 ″Cu 0.003 Ba 0.0295 Sr 0.0211 [Ti 0.467 Zr 0.516 W 0.00753 Yb 0.0095 ]O 3 .
12. A method for producing a piezoelectric component, the method comprising:
providing a mixture of starting materials, the mixture of starting materials are selected from the group consisting of Pb 3 O 4 , TiO 2 , ZrO 2 , WO 3 , RE 2 O 3 , BaCO 3 and SrCO 3 ;
calcining the mixture at a first temperature and milling the calcinated mixture to a first average diameter;
calcining the calcinated mixture at a second temperature that is higher than the first temperature and forming a green body;
forming a metal layer on the green body;
forming a stack of green bodies and metal layers;
debindering the stack; and
sintering the stack thereby forming the piezoelectric component with piezoelectric ceramic layers comprising Pb 1-x-y-[(2a-b)/2]-p/2 V [(2a-b)/2-p/2] ″Cu p Ba x Sr y [(Ti z Zr 1-z ) 1-a-b W a RE b ]O 3 , where RE is a rare earth metal and V″ is a Pb vacancy, where 0≤x≤0.035, 0≤y≤0.025, 0.42≤z≤0.5, 0.0045≤a≤0.009, 0.009≤b≤0.011, 2a>b and p≤2a-b.
13. The method according to claim 12 , wherein forming the metal layer comprises sputtering the metal layer.
14. The method according to claim 12 , wherein the metal layer comprises a Cu layer.
15. The method according to claim 12 , further comprising mixing the mixture calcinated at the first temperature with a sintering aid.
16. The method according to claim 15 , wherein mixing the mixture calcinated at the first temperature with the sintering aid comprises adding PbO or Pb 3 O 4 .
17. The method according to claim 15 , further comprising milling a mixture obtained by mixing the mixture calcinated at the first temperature with the sintering aid to a second average diameter that is smaller than the first average diameter.
18. The method according to claim 12 , wherein debindering the stack comprises steaming the stack with exclusion of oxygen.
19. The method according to claim 12 , wherein sintering comprises heating the stack to a temperature between 1000° C. and 1050° C.
20. The method according to claim 12 , wherein debindering and sintering the stack comprises producing the piezoelectric component comprising Pb 0.9451 V 0.00128 ″Cu 0.003 Ba 0.0295 Sr 0.0211 [Ti 0.467 Zr 0.516 W 0.00753 Yb 0.0095 ]O 3 .