IP Library Granted Patent US 9,812,525
Granted Patent B2
US 9,812,525 · App. 15/373,687 · Granted Nov 7, 2017

Universal methodology to synthesize diverse two-dimensional heterostructures

Inventors: Mildred S. Dresselhaus (Arlington, MA); Jing Kong (Winchester, MA); Tomas A. Palacios (Belmont, MA); Xi Ling (Cambridge, MA); Yuxuan Lin (Cambridge, MA)
Assignee: Massachusetts Institute of Technology
H01L29/068H01L21/0242H01L21/0259H01L21/0262H01L21/02568H01L21/02645H01L29/0665H01L29/24H01L21/02112H01L21/02551
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Quick Facts
Patent No.
US 9,812,525
App. No.
15/373,687
Granted
Nov 7, 2017
Kind
B2
Abstract

A two-dimensional heterostructure is synthesized by producing a patterned first two-dimensional material on a growth substrate. The first two-dimensional material is patterned to define at least one void through which an exposed region of the growth substrate is exposed. Seed molecules are selectively deposited either on the exposed region of the growth substrate or on the patterned first two-dimensional material. A second two-dimensional material that is distinct from the first two-dimensional material is then grown from the deposited seed molecules.

Claims (31)

1. A method for synthesizing a two-dimensional heterostructure, comprising:

producing a patterned first two-dimensional material on a growth substrate, wherein the patterned first two-dimensional material defines at least one void through which an exposed region of the growth substrate is exposed;

selectively depositing seed molecules either on the exposed region of the growth substrate or on the patterned first two-dimensional material; and

growing a second two-dimensional material from the seed molecules, wherein the second two-dimensional material is distinct from the patterned first two-dimensional material.

2. The method of claim 1 , wherein the growth substrate has a hydrophilic surface.

3. The method of claim 2 , wherein the patterned first two-dimensional material is hydrophobic.

4. The method of claim 3 , wherein the patterned first two-dimensional material and the second two-dimensional material have respective crystalline structures with a substantial lattice mismatch.

5. The method of claim 3 , wherein the seed molecules are perylene-3,4,9,10-tetracarboxylic acid tetrapotassium salt molecules.

6. The method of claim 3 , wherein the patterned first two-dimensional material is selected from a metal, a semiconductor and an insulator.

7. The method of claim 3 , wherein the patterned first two-dimensional material is selected from graphene, hexagonal boron nitride, and a transition metal dichalcogenide.

8. The method of claim 7 , wherein the second two-dimensional material comprises a transition metal dichalcogenide.

9. The method of claim 3 , wherein the seed molecules selectively deposit on the exposed region of the growth substrate.

10. The method of claim 9 , wherein the second two-dimensional material is grown side-by-side with the patterned first two-dimensional material.

11. The method of claim 10 , wherein the patterned first two-dimensional material and the second two-dimensional material overlap by no more than 50 nm.

12. The method of claim 1 , wherein the seed molecules are selectively grown on the patterned first two-dimensional material.

13. The method of claim 12 , wherein the seed molecules are copper(II) 1,2,3,4,8,9,10,11,15,16,17,18,22,23,24,25-hexadecafluoro-29H,31H-phthalocyamine molecules.

14. The method of claim 12 , wherein the second two-dimensional material is grown on the patterned first two-dimensional material.

15. The method of claim 1 , wherein the growth substrate comprises silica.

16. The method of claim 1 , wherein the patterned first two-dimensional material and the second two-dimensional material have a thickness no greater than 10 atomic layers.

17. The method of claim 1 , further comprising depositing the first two-dimensional material on the growth substrate and then patterning the first two-dimensional material on the growth substrate.

18. A device with a two-dimensional heterostructure, comprising:

a growth substrate;

a pattern of a first two-dimensional material on the growth substrate, wherein patterned two-dimensional material defines at least one void; and

a second two-dimensional material on the growth substrate in the void defined by the patterned first two-dimensional material, wherein the first two-dimensional material and the second two-dimensional material have a thickness no greater than 10 atomic layers, and wherein the second two-dimensional material fills the void but does not overlap with the first two-dimensional material by more than 50 nm.

19. The device of claim 18 , wherein the growth substrate has a hydrophilic surface.

20. The device of claim 18 , wherein the first two-dimensional material is hydrophobic.

21. The device of claim 20 , wherein the first two-dimensional material and the second two-dimensional material have respective crystalline structures with a substantial lattice mismatch.

22. The device of claim 18 , further comprising aromatic seed molecules at an interface between the growth substrate and the second two-dimensional material.

23. The device of claim 22 , wherein the aromatic seed molecules comprise perylene-3,4,9,10-tetracarboxylic acid tetrapotassium salt molecules.

24. The device of claim 18 , wherein the first two-dimensional material and the second two-dimensional material are components of a logic integrated circuit.

25. The device of claim 18 , wherein the first two-dimensional material and the second two-dimensional material are components of a broadband photodetector.

Assignments (3)
CONFIRMATORY LICENSE Recorded Aug 26, 2019
From: MIT
To: NAVY, SECRETARY OF THE UNITED STATES OF AMERICA
Reel/Frame 050207/0565 →
CONFIRMATORY LICENSE Recorded Jan 18, 2018
From: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 045087/0895 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2017
From: LING, XI; KONG, JING; DRESSELHAUS, MILDRED S; PALACIOS, TOMAS; LIN, YUXUAN
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 041010/0128 →
Continuity (2)
Provisional Application 62265966 · Dec 10, 2015
Related Publication 20170170260A1 · Jun 15, 2017