Film structure body, actuator, motor and method for manufacturing film structure body

1. An actuator, comprising:

a film structure body comprising a single crystal substrate, a first ferromagnetic film oriented and formed on said single crystal substrate, and a piezoelectric film formed on said first ferromagnetic film;

a ferromagnetic substance disposed on an opposite side of said piezoelectric film with said single crystal substrate therebetween, separately from said film structure body; and

a holding part that is connected to a first end part of said film structure body and a second end part of said ferromagnetic substance and holds a gap between said first end part and said second end part.

2. The actuator according to claim 1 , further comprising a second ferromagnetic film or a second electroconductive film formed on said piezoelectric film.

3. The actuator according to claim 1 , wherein said first ferromagnetic film has a tetragonal crystal structure and contains (001)-oriented R 2 Fe 14 B where R is at least one element selected from rare-earth elements.

4. The actuator according to claim 1 , wherein said first ferromagnetic film has a hexagonal crystal structure and contains (11-20)-oriented RCo 4 where R is at least one element selected from rare-earth elements.

5. The actuator according to claim 1 , wherein said first ferromagnetic film contains an alloy of iron, nickel, cobalt and aluminum.

6. The actuator according to claim 1 , wherein said first ferromagnetic film contains an alloy of iron and platinum.

7. The actuator according to claim 1 , wherein said piezoelectric film has a tetragonal crystal structure and contains (001)-oriented lead zirconate titanate.

8. The actuator according to claim 1 , wherein said piezoelectric film has a rhombohedral crystal structure and contains (100)-oriented lead zirconate titanate.

9. A motor comprising a rotatory part and a stationary part, wherein:

said rotatory part has a ring-shaped rotor, a first N-pole permanent magnet, a first S-pole permanent magnet, a second N-pole permanent magnet and a second S-pole permanent magnet which are disposed on an inside circumference of said rotor; and

said stationary part has a ring-shaped stator and a plurality of piezoelectric elements including a film structure body, disposed along on said stator,

said film structure body comprising:

a single crystal substrate;

a first ferromagnetic film oriented and formed on said single crystal substrate;

a piezoelectric film formed on said first ferromagnetic film; and

a second ferromagnetic film or an electroconductive film formed on said piezoelectric film.

10. The actuator according to claim 9 , wherein said first ferromagnetic film has a tetragonal crystal structure and contains (001)-oriented R 2 Fe 14 B where R is at least one element selected from rare-earth elements.

11. The actuator according to claim 9 , wherein said first ferromagnetic film has a hexagonal crystal structure and contains (11-20)-oriented RCo 5 where R is at least one element selected from rare-earth elements.

12. The actuator according to claim 9 , wherein said first ferromagnetic film contains an alloy of iron, nickel, cobalt and aluminum.

13. The actuator according to claim 9 , wherein said first ferromagnetic film contains an alloy of iron and platinum.

14. The actuator according to claim 9 , wherein said piezoelectric film has a tetragonal crystal structure and contains (001)-oriented lead zirconate titanate.

15. The actuator according to claim 9 , wherein said piezoelectric film has a rhombohedral crystal structure and contains (100)-oriented lead zirconate titanate.

16. The actuator according to claim 9 , wherein said electroconductive film has a cubic crystal structure and contains (100)-oriented platinum.

17. The film structure body according to claim 9 , wherein said electroconductive film has a cubic crystal structure and contains (100)-oriented strontium ruthenate.