Manufacturing method of non-planar FET
View Patent ↗The present invention provides a non-planar FET and a method of manufacturing the same. The non-planar FET includes a substrate, a fin structure, a gate and a gate dielectric layer. The fin structure is disposed on the substrate. The fin structure includes a first portion adjacent to the substrate wherein the first portion shrinks towards a side of the substrate. The gate is disposed on the fin structure. The gate dielectric layer is disposed between the fin structure and the gate. The present invention further provides a method of manufacturing the non-planar FET.
1. A method of manufacturing a non-planar FET, comprising:
providing a substrate having at least an active region and an isolation region, wherein the active region is encompassed by the isolation region;
forming a first trench in the substrate in the isolation region and forming an insulation layer in the first trench;
removing a part of the substrate in the active region to form a second trench in the active region;
forming at least a spacer on the sidewalls of the second trench;
forming a fin structure in the second trench;
removing a part of the insulation layer and completely removing the spacer;
forming a gate dielectric layer and a gate on the fin structure;
forming a source/drain region in the fin structure; and
wherein the removing of the part of the insulation layer, a top surface of the insulation layer is leveled with a bottom surface of the fin structure, and a top surface of the substrate is higher than the top surface of the insulation layer.
2. The method of manufacturing a non-planar FET according to claim 1 , wherein the step of forming the insulation layer in the first trench comprises:
forming the insulation layer on the substrate; and
removing the insulation layer outside the first trench.
3. The method of manufacturing a non-planar FET according to claim 2 , further comprising making the top surface of the insulation layer lower than the top surface of the substrate.
4. The method of manufacturing a non-planar FET according to claim 1 , wherein the step of forming the spacer comprises:
forming a material layer on the substrate; and
performing an anisotropic etching process to make the material layer become the spacer.
5. The method of manufacturing a non-planar FET according to claim 1 , wherein the spacer exposes a part of the sidewalls of the insulation layer.
6. The method of manufacturing a non-planar FET according to claim 1 , wherein the spacer is further formed on the insulation layer to cover the sidewalls of the substrate over the insulation layer.
7. The method of manufacturing a non-planar FET according to claim 1 , wherein the step of forming the fin structure comprises a selective epitaxial growth process.
8. The method of manufacturing a non-planar FET according to claim 7 , wherein during the selective epitaxial growth process, the fin structure grows over the top surface of the insulation layer.
9. The method of manufacturing a non-planar FET according to claim 1 , wherein the fin structure has an octagonal shape from end to end in the cross section parallel to the gate.
10. The method of manufacturing a non-planar FET according to claim 9 , wherein the fin structure comprises a first part adjacent to the substrate, and the first part shrinks toward a side of the substrate.