Integrated circuit interconnect structure having metal oxide adhesive layer
View Patent ↗Integrated circuit interconnect structures having a metal oxide adhesive layer between conductive interconnects and dielectric material, as well as related apparatuses and methods are disclosed herein. For example, in some embodiments, an integrated circuit interconnect structure may include a dielectric layer having 60% or more filler, a conductive layer, and a metal oxide adhesive layer between the dielectric and conductive layers. In some embodiments, the metal oxide adhesive layer may include one or more of aluminum oxide, chromium oxide, and nickel oxide.
1. A method of manufacturing an integrated circuit interconnect structure, comprising:
forming a first dielectric layer on a substrate, wherein the first dielectric layer comprises 60% or more filler;
forming a via in the first dielectric layer;
cleaning via formation residue from the via;
depositing a first metal oxide adhesive layer on the first dielectric layer including the via;
depositing a first conductive layer on the first metal oxide adhesive layer, wherein the first metal oxide adhesive layer is in contact with the first dielectric layer and the first conductive layer;
patterning and depositing a second conductive layer on the first conductive layer, wherein the patterning of the second conductive layer exposes areas of the first conductive layer; and
etching the exposed areas of the first conductive layer and the corresponding underlying areas of the first metal oxide adhesive layer.
2. The method of claim 1 , wherein the substrate is a copper clad laminate.
3. The method of claim 1 , wherein the first metal oxide adhesive layer is deposited by sol gel based metal oxide dip coating.
4. The method of claim 3 , wherein depositing the first metal oxide adhesive layer further comprises annealing at a temperature at or below 200 degrees Celsius.
5. The method of claim 1 , wherein the first metal oxide adhesive layer comprises one or more of aluminum oxide, chromium oxide, and nickel oxide.
6. The method of claim 1 , wherein the first conductive layer comprises copper deposited by electroless plating.
7. The method of claim 1 , further comprising:
forming a second dielectric layer on the first dielectric layer and the second conductive layer;
forming a via in the second dielectric layer;
cleaning via formation residue from the via;
depositing a second metal oxide adhesive layer on the second dielectric layer including the via;
depositing a third conductive layer on the second metal oxide adhesive layer, wherein the second metal oxide adhesive layer is in contact with the second dielectric layer and the third conductive layer;
patterning and depositing a fourth conductive layer on the third conductive layer, wherein the patterning of the fourth conductive layer exposes areas of the third conductive layer; and
etching the exposed areas of the third conductive layer and the corresponding underlying areas of the second metal oxide adhesive layer.
8. An integrated circuit package comprising:
a die;
first level interconnects;
second level interconnects; and
a package substrate comprising:
a dielectric layer, wherein the dielectric layer comprises 60% or more filler;
a conductive layer; and
a metal oxide adhesive layer, wherein a thickness of the metal oxide adhesive layer is between 15 nanometers and 40 nanometers, and wherein the metal oxide adhesive layer is in contact with the dielectric layer and the conductive layer.
9. The integrated circuit package of claim 8 , wherein the metal oxide adhesive layer comprises one or more of aluminum oxide, chromium oxide, and nickel oxide.
10. The integrated circuit package of claim 8 , wherein the dielectric layer comprises between 65% and 75% filler.
11. The integrated circuit package of claim 8 , wherein the filler comprises silica.
12. The integrated circuit package of claim 8 , wherein the conductive layer comprises one or more layers, and wherein one of the one or more layers is an electroless copper seed layer.
13. A computing device, comprising:
a circuit board; and
an integrated circuit package coupled to the circuit board, wherein the integrated circuit package comprises:
a die;
first level interconnects;
second level interconnects; and
a package substrate comprising:
a dielectric layer, wherein the dielectric layer comprises 60% or more filler;
a conductive layer; and
a metal oxide adhesive layer, wherein a thickness of the metal oxide adhesive layer is between 15 nanometers and 40 nanometers, and wherein the metal oxide adhesive layer is in contact with the dielectric layer and the conductive layer.
14. The computing device of claim 13 , wherein the metal oxide adhesive layer comprises one or more of aluminum oxide, chromium oxide, and nickel oxide.
15. The computing device of claim 13 , wherein the dielectric layer comprises between 65% and 75% filler.
16. The computing device of claim 13 , wherein the filler comprises silica.
17. The computing device of claim 13 , wherein the conductive layer comprises one or more layers, and wherein one of the one or more layers is an electroless copper seed layer.
18. The method of claim 1 , wherein the first metal oxide adhesive layer comprises oxygen and one or more of aluminum, chromium, and nickel.
19. The integrated circuit package of claim 8 , wherein the metal oxide adhesive layer comprises oxygen and one or more of aluminum, chromium, and nickel.
20. The computing device of claim 13 , wherein the metal oxide adhesive layer comprises oxygen and one or more of aluminum, chromium, and nickel.