Semiconductor structure having a single or multiple layer porous graphene film and the fabrication method thereof
A semiconductor structure having a multiple-porous graphene layer includes a sapphire substrate, a single or multiple layer porous graphene film, and a gallium nitride layer. A fabrication method for forming the semiconductor structure having a single or multiple layer porous graphene film, includes: firstly, growing up the graphene on the copper foil; then, using the acetone and isopropyl alcohol to wash the sapphire substrate, and then using the nitrogen flow to dry up; transferring the graphene onto the semiconductor substrate, using the Poly(methyl methacrylate) to fix the single or multiple layer porous graphene film, and using the acetone to wash up; using the photolithography process to etch the whole surface of the multiple-porous graphene layer; and, using the metalorganic chemical vapor deposition to deposit gallium nitride on the single or multiple layer porous graphene film and the sapphire substrate.
1. A semiconductor structure having a single-layer porous graphene film with a thickness of about 0.34 nm, formed by a low pressure chemical vapor deposition (LPCVD) and a metalorganic chemical vapor deposition (MOCVD), comprising:
a sapphire substrate;
wherein said single-layer porous graphene film having the thickness of about 0.34 nm is provided on said sapphire substrate, said single-layer porous graphene film being formed on a metal foil by the low pressure chemical vapor deposition (LPCVD) at 900° C. to 1100° C. via passing through methane (CH 4 ) and hydrogen (H 2 ),
wherein said metal foil is selected from a group consisting of a Cu foil or Ni foil; and
wherein a gallium nitride layer is formed on said single-layer porous graphene film, said gallium nitride being deposited on said single-layer porous graphene film and said sapphire substrate by using the metalorganic chemical vapor deposition (MOCVD) at 900° C. to 1100° C.
2. A semiconductor structure having a two-layer porous graphene film with a thickness of about 0.7 nm, formed by a low pressure chemical vapor deposition (LPCVD) and a metalorganic chemical vapor deposition (MOCVD), comprising:
a sapphire substrate;
said two-layer porous graphene film having the thickness of about 0.7 nm is provided on said sapphire substrate, said two-layer porous graphene film being formed on a metal foil by the low pressure chemical vapor deposition (LPCVD) at 900° C. to 1100° C. via passing through methane (CH 4 ) and hydrogen (H 2 ),
wherein said metal foil is selected from a group consisting of a Cu foil or Ni foil; and
wherein a gallium nitride layer is formed on said two-layer porous graphene film, said gallium nitride being deposited on said two-layer porous graphene film and said sapphire substrate by using the metalorganic chemical vapor deposition (MOCVD) at 900° C. to 1100° C.
3. A semiconductor structure having a three-layer porous graphene film with a thickness of about 1 nm, formed by a low pressure chemical vapor deposition (LPCVD) and a metalorganic chemical vapor deposition (MOCVD), comprising:
a sapphire substrate;
said three-layer porous graphene film having the thickness of about 1 nm is provided on said sapphire substrate, said three-layer porous graphene film being formed on a metal foil by the low pressure chemical vapor deposition (LPCVD) at 900° C. to 1100° C. via passing through methane (CH 4 ) and hydrogen (H 2 ),
wherein said metal foil is selected from a group consisting of a Cu foil or Ni foil; and
wherein a gallium nitride layer is formed on said three-layer porous graphene film, said gallium nitride being deposited on said three-layer porous graphene film and said sapphire substrate by using the metalorganic chemical vapor deposition (MOCVD) at 900° C. to 1100° C.