IP Library Granted Patent US 10,193,057
Granted Patent B2
US 10,193,057 · App. 15/400,466 · Granted Jan 29, 2019

Magnetic memory device

Inventors: Masatoshi Yoshikawa (Seoul, KR); Hiroaki Yoda (Kawasaki Kanagawa, JP); Shuichi Tsubata (Seoul, KR); Kenji Noma (Yokohama Kanagawa, JP); Tatsuya Kishi (Seongnam-si Gyeonggi-do, KR); Satoshi Seto (Seoul, KR); Kazuhiro Tomioka (Seoul, KR)
Assignee: TOSHIBA MEMORY CORPORATION
H01L43/02H01L43/08H01L43/10H01L43/12
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Quick Facts
Patent No.
US 10,193,057
App. No.
15/400,466
Granted
Jan 29, 2019
Kind
B2
Abstract

A magnetic memory device includes a stacked structure including a magnetic element, a protective insulating film covering the stacked structure, and an interface layer provided at an interface between the stacked structure and the protective insulating film. The interface layer contains a predetermined element which is not contained in the magnetic element or the protective insulating film.

Claims (9)

1. A magnetic memory device comprising:

a stacked structure including a magnetic element; and

a protective insulating film which covers the stacked structure and is formed of a metallic oxide,

wherein:

a metal element contained in the metallic oxide is selected from yttrium (Y), calcium (Ca) and hafnium (Hf), and

a linear coefficient of thermal expansion of the metallic oxide is greater than 5×10−6/K.

2. The device of claim 1 , wherein the linear coefficient of thermal expansion of the metallic oxide is greater than 7×10 −6 /K.

3. The device of claim 1 , wherein the magnetic element contains at least one of cobalt (Co), iron (Fe), boron (B) and magnesium (Mg).

4. The device of claim 1 , wherein the magnetic element includes a first magnetic layer, a second magnetic layer, and a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer.

Assignments (5)
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 14, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043194/0563 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 6, 2017
From: YOSHIKAWA, MASATOSHI; YODA, HIROAKI; TSUBATA, SHUICHI; NOMA, KENJI; KISHI, TATSUYA; SETO, SATOSHI; TOMIOKA, KAZUHIRO
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 040875/0333 →
Continuity (3)
Division 14479192 · Sep 5, 2014
Provisional Application 61952047 · Mar 12, 2014
Related Publication 20170117454A1 · Apr 27, 2017
Cited By (1)
US 12,432,930