Resin composition, resist pattern-forming method and polymer
A resin composition comprises a polymer comprising a structural unit that comprises a group represented by formula (1), and a solvent. In the formula (1), R 1 to R 4 each independently represent a hydrogen atom, a fluorine atom or a monovalent organic group having 1 to 20 carbon atoms, wherein at least one of R 1 to R 4 has the fluorine atom or a group including the fluorine atom. R 5 represents a substituted or unsubstituted trivalent chain hydrocarbon group having 1 to 7 carbon atoms. * denotes a binding site to other moiety of the structural unit. The structural unit is preferably represented by any one of formulae (2-1) to (2-3). In the formulae (2-1) to (2-3), Z represents a group represented by formula (1).
1. A resin composition comprising:
a solvent; and
a fluorine-containing polymer comprising a structural unit represented by at least one selected from the group consisting of formula (2-1-1), formula (2-1-2), formula (2-1-3), formula (2-1-4), formula (2-1-5), formula (2-1-7) and formula (2-1-8):
wherein R 6 represents a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group.
2. The resin composition according to claim 1 , further comprising a radiation-sensitive acid generator.
3. The resin composition according to claim 2 , further comprising a polymer comprising a structural unit that comprises an acid-labile group, and having a lower percentage content of fluorine atoms than a percentage content of fluorine atoms of the fluorine-containing polymer.
4. A resist pattern-forming method comprising:
applying the resin composition according to claim 2 directly or indirectly on a substrate to form a resist film;
exposing the resist film; and
developing the resist film exposed.
5. A laminate structure comprising:
a resist film; and
a protective film which is a cured product of the resin composition according to claim 1 , and which is overlaid on the resist film.
6. The resin composition according to claim 1 , wherein the fluorine-containing polymer further comprises: a structural unit comprising an acid-labile group; and a structural unit comprising at least one selected from the group consisting of a lactone structure, a cyclic carbonate structure and a sultone structure.
7. The resin composition according to claim 6 , wherein an amount of the structural unit represented by at least one selected from the group consisting of formula (2-1-1), formula (2-1-2), formula (2-1-3), formula (2-1-4), formula (2-1-5), formula (2-1-7) and formula (2-1-8) in the fluorine-containing polymer with respect to total structural units constituting the fluorine-containing polymer is from 10 to 30 mol %.
8. The resin composition according to claim 1 , wherein the fluorine-containing polymer further comprises: a structural unit comprising an acid-labile group; and a structural which has a fluorine atom and which is not the structural unit comprising a group represented by formula (1):
wherein, in the formula (1), R 1 to R 4 each independently represent a hydrogen atom, a fluorine atom or a monovalent organic group having 1 to 20 carbon atoms, wherein at least one of R 1 to R 4 represents the fluorine atom or a group comprising the fluorine atom, R 5 represents a substituted or unsubstituted trivalent chain hydrocarbon group having 1 to 7 carbon atoms, and * denotes a binding site to other moiety of the structural unit.
9. The resin composition according to claim 8 , wherein an amount of the structural unit represented by at least one selected from the group consisting of formula (2-1-1), formula (2-1-2), formula (2-1-3), formula (2-1-4), formula (2-1-5), formula (2-1-7) and formula (2-1-8) in the fluorine-containing polymer with respect to total structural units constituting the fluorine-containing polymer is from 60 to 80 mol %.
10. The resin composition according to claim 1 , wherein the fluorine-containing polymer further comprises: a structural unit comprising a group having a hydroxy group at the end thereof and at least one fluorine atom or a fluorinated alkyl group on a carbon atom adjacent to the hydroxy group.
11. The resin composition according to claim 10 , wherein an amount of the structural unit represented by at least one selected from the group consisting of formula (2-1-1), formula (2-1-2), formula (2-1-3), formula (2-1-4), formula (2-1-5), formula (2-1-7) and formula (2-1-8) in the fluorine-containing polymer with respect to total structural units constituting the fluorine-containing polymer is from 35 to 60 mol %.
12. A polymer comprising a structural unit represented by at least one selected from the group consisting of formula (2-1-1), formula (2-1-2), formula (2-1-3), formula (2-1-4), formula (2-1-5), formula (2-1-7) and formula (2-1-8):
wherein R 6 represents a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group.