Mitigation of contamination of electroplated cobalt-platinum films on substrates
View Patent ↗Various embodiments to mitigate the contamination of electroplated cobalt-platinum films on substrates are described. In one embodiment, a device includes a substrate, a titanium nitride diffusion barrier layer formed upon the substrate, a titanium layer formed upon the titanium nitride diffusion barrier layer, a platinum seed layer, and a cobalt-platinum magnetic layer formed upon the platinum seed layer. Based in part on the use of the titanium nitride diffusion barrier layer and/or the platinum seed layer, improvements in the interfaces between the layers can be achieved after annealing, with less delamination, and with substantial improvements in the magnetic properties of the cobalt-platinum magnetic layer. Further, the cobalt-platinum magnetic layer can be formed at a relatively thin thickness of hundreds of nanometers to a few microns while still maintaining good magnetic properties.
1. A device, comprising:
a substrate;
a diffusion barrier formed over the substrate;
a seed layer formed over the diffusion barrier, wherein the seed layer comprises at least one of platinum, cobalt, palladium, ruthenium, rhodium, osmium, or iridium; and
a cobalt-platinum magnetic layer formed upon the seed layer.
2. The device according to claim 1 , wherein the cobalt-platinum magnetic layer is formed upon the seed layer at a thickness of less than about three microns through an electroplating process.
3. The device according to claim 1 , further comprising an adhesion layer formed upon the diffusion barrier and between the diffusion barrier and the seed layer.
4. The device according to claim 1 , wherein the diffusion barrier is formed upon the substrate.
5. The device according to claim 4 , wherein the diffusion barrier comprises at least one of titanium nitride, tantalum nitride, tungsten nitride, indium oxide, nickel, tantalum, halfnium, niobium, zirconium, vanadium, or tungsten.
6. The device according to claim 4 , wherein:
the cobalt-platinum magnetic layer is electroplated upon the seed layer and annealed to induce a crystallographic ordering of the cobalt-platinum magnetic layer from a disordered phase to an ordered equilibrium phase; and
the diffusion barrier inhibits a reaction at an interface between the substrate and the seed layer as the cobalt-platinum magnetic layer is annealed to induce the ordered equilibrium phase.
7. The device according to claim 1 , wherein the substrate comprises at least one of 100, 110, or 111-oriented single crystal silicon.
8. The device according to claim 1 , wherein the substrate comprises at least one of single crystal silicon, silicon compound, polycrystalline silicon, silicon dioxide, silicon carbide, silicon nitride.
9. The device according to claim 1 , wherein the substrate comprises at least one of germanium, gallium arsenide, quartz, or ceramic compound.
10. A device, comprising:
a substrate;
a diffusion barrier formed over the substrate, wherein the diffusion barrier comprises at least one titanium nitride, tantalum nitride, tungsten nitride, indium oxide, nickel, tantalum, halfnium, niobium, zirconium, vanadium, or tungsten;
a seed layer formed over the diffusion barrier, wherein the seed layer comprises at least one of platinum, cobalt, palladium, ruthenium, rhodium, osmium, or iridium; and
a cobalt-platinum magnetic layer formed over the diffusion barrier.
11. The device according to claim 10 , wherein the cobalt-platinum magnetic layer is formed upon the seed layer at a thickness of less than about three microns through an electroplating process.
12. The device according to claim 10 , further comprising an adhesion layer formed upon the diffusion barrier and between the diffusion barrier and the seed layer.
13. The device according to claim 10 , wherein:
the cobalt-platinum magnetic layer is electroplated upon the seed layer and annealed to induce a crystallographic ordering of the cobalt-platinum magnetic layer from a disordered phase to an ordered equilibrium phase; and
the diffusion barrier inhibits a reaction at an interface between the substrate and the seed layer as the cobalt-platinum magnetic layer is annealed to induce the ordered equilibrium phase.
14. The device according to claim 10 , wherein the substrate comprises at least one of 100, 110, or 111-oriented single crystal silicon.
15. A device, comprising:
a substrate;
a diffusion barrier formed upon the substrate, wherein the diffusion barrier comprises at least one of titanium nitride, tantalum nitride, tungsten nitride, indium oxide, nickel, tantalum, halfnium, niobium, zirconium, vanadium, or tungsten;
a seed layer formed over the diffusion barrier; and
a cobalt-platinum magnetic layer formed upon the seed layer.
16. The device according to claim 15 , further comprising an adhesion layer formed upon the diffusion barrier and between the diffusion barrier and the seed layer.
17. The device according to claim 15 , wherein:
the cobalt-platinum magnetic layer is formed upon the seed layer at a thickness of less than about three microns through an electroplating process;
the cobalt-platinum magnetic layer is annealed to induce a crystallographic ordering of the cobalt-platinum magnetic layer from a disordered phase to an ordered equilibrium phase; and
the diffusion barrier inhibits a reaction at an interface between the substrate and the seed layer as the cobalt-platinum magnetic layer is annealed to induce the ordered equilibrium phase.
18. The device according to claim 15 , wherein the substrate comprises at least one of 100, 110, or 111-oriented single crystal silicon.
19. The device according to claim 15 , wherein the substrate comprises at least one of single crystal silicon, silicon compound, polycrystalline silicon, silicon dioxide, silicon carbide, silicon nitride.
20. The device according to claim 15 , wherein the substrate comprises at least one of germanium, gallium arsenide, quartz, or ceramic compound.