GAS SENSOR
In accordance with some embodiments of the present invention, a gas sensor system is disclosed. In accordance with some embodiments, a system includes a glass substrate; a heater formed on the glass substrate; and a sensor formed adjacent the heater formed on the glass substrate. A method of forming a gas sensor system according to some embodiments includes providing a glass substrate; forming a heater on the glass substrate; and forming a sensor adjacent the heater on the glass substrate.
1 . A system, comprising:
a glass substrate;
a heater formed on the glass substrate; and
a sensor formed adjacent the heater formed on the glass substrate.
2 . The system of claim 1 , wherein the glass substrate includes a cavity under the heater and the sensor.
3 . The system of claim 1 , wherein the glass substrate is thin.
4 . A method of forming a gas sensor system, comprising:
providing a glass substrate;
forming a heater on the glass substrate; and
forming a sensor adjacent the heater on the glass substrate.
5 . The method of claim 4 , further including forming a cavity in the glass substrate.
6 . The method of claim 4 , further including thinning the glass substrate.
7 . A system, comprising:
a sensor system having a heater and a sensor formed adjacent to the heater on a glass substrate;
a system substrate on which the sensor system is mounted.
8 . The system of claim 7 , wherein the system substrate is a printed circuit board.
9 . The system of claim 7 , wherein the system substrate is a silicon substrate.
10 . The system of claim 9 , wherein the silicon substrate includes a cavity that receives the sensor system.