Dielectric and isolation lower fin material for fin-based electronics
A dielectric and isolation lower fin material is described that is useful for fin-based electronics. In some examples, a dielectric layer is on first and second sidewalls of a lower fin. The dielectric layer has a first upper end portion laterally adjacent to the first sidewall of the lower fin and a second upper end portion laterally adjacent to the second sidewall of the lower fin. An isolation material is laterally adjacent to the dielectric layer directly on the first and second sidewalls of the lower fin and a gate electrode is over a top of and laterally adjacent to sidewalls of an upper fin. The gate electrode is over the first and second upper end portions of the dielectric layer and the isolation material.
1. An integrated circuit structure, comprising:
a fin comprising silicon, the fin having a lower fin portion and an upper fin portion;
a layer comprising a phosphosilicate glass (PSG), t layer comprising the PSG directly
on first and second sidewalls of the lower fin portion of the fin, the layer comprising the PSG having a first upper end portion laterally adjacent to the first sidewall of the lower fin portion of the fin, and the layer comprising the PSG having a second upper end portion laterally adjacent to the second sidewall of the lower fin portion of the fin;
an isolation material comprising oxygen, the isolation material laterally adjacent to the layer comprising the PSG directly on the first and second sidewalls of the lower fin portion of the fin, the isolation material having a first upper surface portion and a second upper surface portion, wherein the first upper surface portion of the isolation material is below the first upper end portion of the layer comprising the PSG, and wherein the second upper surface portion of the isolation material is below the second upper end portion of the layer comprising the PSG; and
a gate electrode over a top of and laterally adjacent to sidewalls of the upper fin portion of the fin, and the gate electrode over the first and second upper end portions of the layer comprising the PSG, and the gate electrode over the first and second upper surface portions of the isolation material.
2. The integrated circuit structure of claim 1 , wherein the first upper surface portion of the isolation material is laterally adjacent to the layer comprising the PSG on the first sidewall of the lower fin portion of the fin.
3. The integrated circuit structure of claim 2 , wherein the second upper surface portion of the isolation material is laterally adjacent to the layer comprising the PSG on the second sidewall of the lower fin portion of the fin.
4. The integrated circuit structure of claim 1 , further comprising:
an insulating layer directly laterally adjacent to the layer comprising the PSG directly on the first and second sidewalls of the lower fin portion of the fin, wherein the isolation material is directly laterally adjacent to the insulating layer.
5. The integrated circuit structure of claim 4 , wherein the insulating layer comprises a borosilicate glass (BSG).
6. The integrated circuit structure of claim 4 , wherein the insulating layer has a first upper end portion laterally adjacent to the first upper end portion of the layer comprising the PSG, and wherein the insulating layer has a second upper end portion laterally adjacent to the second upper end portion of the layer comprising the PSG.
7. The integrated circuit structure of claim 6 , wherein the first upper end portion of the insulating layer is substantially co-planar with the first upper end portion of the layer comprising the PSG, and wherein the second upper end portion of the insulating layer is substantially co-planar with the second upper end portion of the layer comprising the PSG.
8. The integrated circuit structure of claim 6 , wherein the first upper surface portion of the isolation material is below the first upper end portion of the insulating layer, and wherein the second upper surface portion of the isolation material is below the second upper end portion of the insulating layer.
9. The integrated circuit structure of claim 6 , wherein the gate electrode is over the first and second upper end portions of the insulating layer.
10. The integrated circuit structure of claim 1 , wherein the first upper end portion of the layer comprising the PSG is substantially co-planar with the second upper end portion of the layer comprising the PSG.
11. The integrated circuit structure of claim 10 , wherein the first upper surface portion of the isolation material is substantially co-planar with the second upper surface portion of the isolation material.
12. An integrated circuit structure, comprising:
a fin comprising silicon, the fin having a lower fin portion and an upper fin portion;
a dielectric layer comprising an N-type dopant, the dielectric layer directly on first and second sidewalls of the lower fin portion of the fin, the dielectric layer having a first upper end portion laterally adjacent to the first sidewall of the lower fin portion of the fin, and the dielectric layer having a second upper end portion laterally adjacent to the second sidewall of the lower fin portion of the fin;
an isolation material comprising oxygen, the isolation material laterally adjacent to the dielectric layer directly on the first and second sidewalls of the lower fin portion of the fin, the isolation material having a first upper surface portion and a second upper surface portion, wherein the first upper surface portion of the isolation material is below the first upper end portion of the dielectric layer, and wherein the second upper surface portion of the isolation material is below the second upper end portion of the dielectric layer; and
a gate electrode over a top of and laterally adjacent to sidewalls of the upper fin portion of the fin, and the gate electrode over the first and second upper end portions of the dielectric layer, and the gate electrode over the first and second upper surface portions of the isolation material.
13. The integrated circuit structure of claim 12 , wherein the N-type dopant is phosphorous.
14. The integrated circuit structure of claim 12 , wherein the first upper surface portion of the isolation material is laterally adjacent to the dielectric layer on the first sidewall of the lower fin portion of the fin.
15. The integrated circuit structure of claim 14 , wherein the second upper surface portion of the isolation material is laterally adjacent to the dielectric layer on the second sidewall of the lower fin portion of the fin.
16. The integrated circuit structure of claim 12 , further comprising:
an insulating layer directly laterally adjacent to the dielectric layer directly on the first and second sidewalls of the lower fin portion of the fin, wherein the isolation material is directly laterally adjacent to the insulating layer.
17. The integrated circuit structure of claim 16 , wherein the insulating layer comprises a borosilicate glass (BSG).
18. The integrated circuit structure of claim 16 , wherein the insulating layer has a first upper end portion laterally adjacent to the first upper end portion of the dielectric layer, and wherein the insulating layer has a second upper end portion laterally adjacent to the second upper end portion of the dielectric layer.
19. The integrated circuit structure of claim 18 , wherein the first upper end portion of the insulating layer is substantially co-planar with the first upper end portion of the dielectric layer, and wherein the second upper end portion of the insulating layer is substantially co-planar with the second upper end portion of the dielectric layer.
20. The integrated circuit structure of claim 18 , wherein the first upper surface portion of the isolation material is below the first upper end portion of the insulating layer, and wherein the second upper surface portion of the isolation material is below the second upper end portion of the insulating layer.
21. The integrated circuit structure of claim 18 , wherein the gate electrode is over the first and second upper end portions of the insulating layer.
22. The integrated circuit structure of claim 12 , wherein the first upper end portion of the dielectric layer is substantially co-planar with the second upper end portion of the dielectric layer.
23. The integrated circuit structure of claim 22 , wherein the first upper surface portion of the isolation material is substantially co-planar with the second upper surface portion of the isolation material.