IP Library › Granted Patent US 10,177,305
Granted Patent B2
US 10,177,305 · App. 15/410,594 · Granted Jan 8, 2019

Templating layers for perpendicularly magnetized heusler films

Inventors: Jaewoo Jeong (San Jose, CA); Stuart S. P. Parkin (San Jose, CA); Mahesh G. Samant (San Jose, CA)
Assignee: International Business Machines Corporation
H01L43/10C22C19/07C22C22/00C22F1/10C22F1/16G11C11/16H01F10/16H01F10/1936H01F10/30H01F41/14H01L43/08H01L43/12H01F10/123H01F10/3254H01F10/3286
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Quick Facts
Patent No.
US 10,177,305
App. No.
15/410,594
Granted
Jan 8, 2019
Kind
B2
Abstract

Devices are described that include a multi-layered structure that is non-magnetic at room temperature, and which comprises alternating layers of Co and at least one other element E (such as Ga, Ge, and Sn). The composition of this structure is represented by Co 1-x E x , with x being in the range from 0.45 to 0.55. The structure is in contact with a first magnetic layer that includes a Heusler compound. An MRAM element may be formed by overlying, in turn, the first magnetic layer with a tunnel barrier, and the tunnel barrier with a second magnetic layer (whose magnetic moment is switchable). Improved performance of the MRAM element may be obtained by placing a pinning layer between the first magnetic layer and the tunnel barrier.

Claims (39)

1. A device, comprising:

a multi-layered structure that is non-magnetic at room temperature, the structure comprising alternating layers of Co and at least one other element E selected from the group consisting of Ga, Ge, and Sn, wherein the composition of the structure is represented by Co 1-x E x , with x being in the range from 0.45 to 0.55; and

a first magnetic layer that includes a Heusler compound, the magnetic layer being in contact with the structure.

2. The device of claim 1 , wherein the magnetic moment of the magnetic layer is substantially perpendicular to the interface between the structure and the magnetic layer.

3. The device of claim 2 , wherein the magnetic layer has a thickness of less than 5 nm.

4. The device of claim 2 , wherein the magnetic layer has a thickness of less than 3 nm.

5. The device of claim 2 , wherein the magnetic layer has a thickness of one unit cell.

6. The device of claim 1 , wherein the Heusler compound is selected from the group consisting of Mn 3.1-z Ge, Mn 3.1-z Sn, and Mn 3.1-z Sb, with z being in the range from 0 to 1.1.

7. The device of claim 1 , wherein the Heusler compound is a ternary Heusler.

8. The device of claim 7 , wherein the ternary Heusler is Mn 3.1-z Co 1.1-y Sn, wherein z≤1.2 and y≤1.0.

9. The device of claim 1 , wherein E is Ga.

10. The device of claim 1 , wherein E is Ge.

11. The device of claim 1 , wherein E is Sn.

12. The device of claim 1 , comprising a substrate underlying the multi-layered structure.

13. The device of claim 12 , comprising a tunnel barrier overlying the first magnetic layer, thereby permitting current to pass through both the tunnel barrier and the first magnetic layer.

14. The device of claim 13 , comprising a second magnetic layer in contact with the tunnel barrier.

15. The device of claim 14 , wherein the tunnel barrier is MgO.

16. A device, comprising:

a substrate;

a multi-layered structure that is non-magnetic at room temperature, the structure comprising alternating layers of Co and at least one other element E selected from the group consisting of Ga, Ge, and Sn, wherein the composition of the structure is represented by Co 1-x E x , with x being in the range from 0.45 to 0.55, wherein the structure overlies the substrate;

a first magnetic layer that includes a Heusler compound, the magnetic layer being in contact with the structure;

a tunnel barrier overlying the first magnetic layer; and

a second magnetic layer in contact with the tunnel barrier, wherein the second magnetic layer has a magnetic moment that is switchable.

17. The device of claim 16 , comprising a capping layer in contact with the second magnetic layer.

18. The device of claim 16 , wherein the first magnetic layer includes Mn and an element selected from the group consisting of Sn, Sb, and Ge.

19. The device of claim 18 , wherein the first magnetic layer further includes Co.

20. A method, comprising:

using the device of claim 14 as a memory element.

21. A method, comprising:

using the device of claim 12 as part of a racetrack memory device.

22. A method of forming the device of claim 1 , comprising:

depositing Co and Ge, thereby forming a composite layer on a substrate;

annealing the composite layer, so that at least one layer of Co and at least one layer of Ge are formed from the composite layer, thereby forming the multi-layered structure; and

depositing the magnetic layer over the multi-layered structure.

23. The method of claim 22 , wherein the annealing takes place at a temperature of at least 400° C., and the element E includes Ga.

24. The method of claim 22 , wherein the annealing takes place at a temperature of at least 400° C., and the element E includes Ge.

25. The method of claim 22 , wherein the annealing takes place at a temperature less than 400° C., and the element E includes Sn.

26. The method of claim 22 , wherein the substrate is MgO.

27. The method of claim 26 , wherein a layer of Cr overlies the MgO.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 20, 2017
From: JEONG, JAEWOO; PARKIN, STUART S.P.; SAMANT, MAHESH G.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 041024/0582 →
Continuity (1)
Related Publication 20180205008A1 · Jul 19, 2018
Cited By (2)
US 12,274,179 US 12,317,508