Method for producing a vertical organic field-effect transistor, and vertical organic field-effect transistor
The invention relates to a method for producing a vertical organic field-effect transistor, in which a vertical organic field-effect transistor with a layer arrangement is produced on a substrate, said layer arrangement including transistor electrodes, namely a first electrode ( 23; 24 ), a second electrode ( 23; 24 ) and a third electrode ( 32 ), electrically insulating layers ( 25; 34 ) and an organic semiconductor layer ( 28 ). In addition, a vertical organic field-effect transistor is provided, which includes a layer arrangement with transistor electrodes on a substrate ( 21 ).
1. Method for producing a vertical organic field-effect transistor, in which a vertical organic field-effect transistor with a layer arrangement is produced on a substrate, said layer arrangement comprising transistor electrodes, namely a first electrode, a second electrode and a third electrode, electrically insulating layers and an organic semiconductor layer, wherein the method comprises the following steps:
providing a substrate,
depositing a selectively adhesive layer on the substrate;
producing a partial layer structure of the vertical organic field-effect transistor, which comprises at least one of the transistor electrodes and at least one of the electrically insulating layers, which adhere to the selectively adhesive layer in a respective direct contact region; and
producing at least one organic semiconductor layer, by at least one organic semiconductor material being adhesively deposited on the partial layer structure and the selectively adhesive layer preventing an adhesive deposition of the at least one organic semiconductor material outside of the partial layer structure; and
producing a residual partial layer structure of the vertical organic field-effect transistor.
2. Method according to claim 1 , wherein the partial layer structure is produced with the first electrode.
3. Method according to claim 2 , wherein the organic semiconductor layer is adhesively deposited on the first electrode, the second electrode and the at least one electrically insulating layer.
4. Method according to claim 1 , wherein in producing the partial layer structure the at least one transistor electrodes and the at least one electrically insulating layer are structured.
5. Method according to claim 4 , wherein the structuring is implemented as a plasma-assisted etching, in which case a plasma application also covers a surface of the selectively adhesive layer outside of the partial layer structure.
6. Method according to claim 1 , wherein a layer made from the at least one organic semiconductor material, which is not adhesively deposited outside the partial layer structure during production of the semiconductor layer, makes a contact angle of greater than 21±2 degrees with a surface of the selectively adhesive layer.
7. Method according to claim 6 , wherein the layer made from the at least one organic semiconductor material is formed as a non-closed layer.
8. Method according to claim 1 , wherein the selectively adhesive layer is made from an electrically insulating material.