Vessel With Filter
A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.
1 . A vessel for conveying a precursor-containing fluid stream from a solid precursor material contained within the vessel, the vessel comprising:
an interior volume defined by a top, one or more sidewalls, and a base; at least one fluid outlet for vaporized precursor; and at least one particle barrier that defines at least part of at least one particle restricted space within the interior volume; wherein said at least one particle barrier comprises at least one 3-dimensional filter having a shape selected from the group consisting of tubular, bellow, and cup.
2 . The vessel of claim 1 , wherein said at least one particle restricted space is in fluid communication with the at least one outlet and in particle restricted fluid communication with a portion of the interior volume excluding the at least one particle restricted space in fluid communication with said at least one outlet.
3 . The vessel of claim 1 , further comprising at least one inlet that directs at least one carrier gas into the interior volume of the vessel.
4 . The vessel of claim 3 , wherein said at least one particle restricted space is in fluid communication with said at least one inlet and in particle restricted fluid communication with a portion of the interior volume excluding the at least one particle restricted space in communication with said at least one inlet.
5 . The vessel of claim 3 , wherein said at least one particle barrier comprises a first particle barrier and a second particle barrier, said at least one particle restricted space comprises at least one first particle restricted space and at least one second particle restricted space, wherein said second particle barrier defines at least part of said at least one second particle restricted space within the interior volume, each of said at least one first and at least one second particle restricted spaces comprising at least one filter, and said at least one filter comprises said at least one three-dimensional filter, wherein said at least one first particle restricted space is in fluid communication with said at least one fluid outlet and said at least one second particle restricted space is in fluid communication with said at least one fluid inlet, and said at least one first and second particle restricted spaces are in particle restricted fluid communication with said portion of said interior volume excluding said at least one first and second particle restricted spaces.
6 . The vessel of claim 5 , wherein said second particle barrier comprises at least one 2-dimensional filter.
7 . The vessel of claim 5 , wherein said second particle barrier comprises said at least one three dimensional filter.
8 . The vessel of claim 1 , wherein said particle barrier is attached to one or more of the following: an inlet pipe that extends into the interior volume, an outlet pipe that extends into the interior volume, the one or more sidewalls, the top or the base.
9 . The vessel of claim 1 , further wherein said top is a lid and further comprising at least one fluid inlet which passes through the lid and directs at least one carrier gas into the interior volume of the vessel and said at least one fluid outlet passes through the lid.
10 . The vessel of claim 1 , wherein said at least one 3-dimensional filter has a shape selected from the group consisting of: tubular, cup, bellows, cube, cone, hockey puck, and tubular loop.
11 . The vessel of claim 10 wherein the at least one 3-dimensional filter comprises a cup selected from a single cup or a multiple cup.
12 . The vessel of claim 10 wherein the cup is a single cup.
13 . The vessel of claim 12 wherein the cup further comprises a tube within a cup.
14 . The vessel of claim 1 , wherein the at least one filter has a surface area greater than 20 square inches.
15 . The vessel of claim 1 , wherein the at least one filter has a Volume Design Factor greater than or equal to 0.25 inch −1 .
16 . The vessel in accordance of claim 1 , wherein the at least one filter in the vessel has a Surface Area Design Factor greater than 0.8 inch.
17 . The vessel of claim 1 comprising multiple said outlets, each of said outlets having a particle barrier thereon.