Carrier and a method for processing a carrier
According to various embodiments, a carrier may be provided, the carrier including: a hollow chamber spaced apart from a surface of the carrier; a trench structure extending from the surface of the carrier to the hollow chamber and laterally surrounding a first region of the carrier, the trench structure including one or more trenches extending from the surface of the carrier to the hollow chamber, and one or more support structures intersecting the one or more trenches and connecting the first region of the carrier with a second region of the carrier outside the trench structure, wherein the one or more support structures including an electrically insulating material.
1. A method for processing a carrier, the method comprising:
forming a hollow chamber within the carrier and spaced apart from a surface of the carrier;
forming a trench structure extending from the surface of the carrier to the hollow chamber and laterally surrounding a first region of the carrier, the trench structure comprising one or more trenches extending from the surface of the carrier to the hollow chamber, and one or more support structures intersecting the one or more trenches and connecting the first region of the carrier with a second region of the carrier outside the trench structure, wherein the one or more support structures comprising an electrically insulating material;
destroying the one or more support structures; and
removing the first region from the carrier.
2. The method according to claim 1 ,
wherein forming the hollow chamber within the carrier comprises:
forming an opening structure in the carrier, the opening structure comprising one or more openings, each of the one or more openings extending from the surface of the carrier; and
performing an anneal process such that the hollow chamber is formed in the carrier from the opening structure.
3. The method according to claim 1 ,
wherein forming the hollow chamber within the carrier comprises:
forming at least one porous region in the carrier, and
performing an anneal process such that the hollow chamber is formed in the carrier from the porous region.
4. The method according to claim 1 ,
wherein forming the trench structure comprises:
forming one or more trenches extending from the surface of the carrier to the hollow chamber, wherein carrier material remains between the one or more trenches, and
at least partially oxidizing the remaining carrier material within the trench structure to form the one or more support structures.
5. A method for processing a carrier, the method comprising:
forming an opening structure in the carrier, the opening structure comprising one or more openings, each of the one or more openings extending from a surface of the carrier;
performing an anneal process to form a hollow chamber in the carrier from the opening structure, the hollow chamber spaced apart from the surface of the carrier;
forming trench structure extending from the surface of the carrier to the hollow chamber and laterally surrounding a first region of the carrier, the trench structure comprising one or more trenches extending from the surface of the carrier to the hollow chamber, and one or more support structures intersecting the one or more trenches and connecting the first region of the carrier with a second region of the carrier outside the trench structure;
destroying the one or more support structures; and
removing the first region from the carrier.
6. The method according to claim 5 ,
wherein forming the trench structure comprises:
forming one or more trenches extending from the surface of the carrier to the hollow chamber, wherein carrier material remains between the one or more trenches providing the one or more support structures intersecting the one or more trenches.
7. The method according to claim 5 , further comprising:
partially oxidizing the one or more support structures.
8. The method according to claim 5 , further comprising:
completely oxidizing the one or more support structures.
9. The method according to claim 5 , further comprising:
forming a first electronic circuit at least one of over and in the first region of the carrier.