IP Library Granted Patent US 10,541,346
Granted Patent B2
US 10,541,346 · App. 15/425,717 · Granted Jan 21, 2020

High work function MoO

Inventors: Priscilla D. Antunez (Tarrytown, NY); Douglas M. Bishop (New York, NY); Gloria W. Fraczak (Bellerose, NY); Oki Gunawan (Westwood, NJ); Richard A. Haight (Mahopac, NY)
Assignee: International Business Machines Corporation
H01L31/072H01L31/0326H01L31/18
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,541,346
App. No.
15/425,717
Granted
Jan 21, 2020
Kind
B2
Abstract

Improved high work function back contacts for solar cells are provided. In one aspect, a method of forming a solar cell includes: forming a completed solar cell having a substrate coated with an electrically conductive material, an absorber disposed on the electrically conductive material, a buffer layer disposed on the absorber, a transparent front contact disposed on the buffer layer, and a metal grid disposed on the transparent front contact; removing the substrate and the electrically conductive material using exfoliation, exposing a backside surface of the solar cell; depositing a high work function material onto the back side surface of the solar cell; and depositing a back contact onto the high work function material. A solar cell formed by the present techniques is also provided. Yield of the exfoliated device can be improved by removing bubbles from adhesive used for exfoliation and/or forming contact pads to access the metal grid.

Claims (29)

1. A method of forming a solar cell, the method comprising:

forming a completed solar cell comprising a substrate coated with an electrically conductive material, an absorber disposed on the electrically conductive material, a buffer layer disposed on the absorber, a transparent front contact disposed on the buffer layer, and a metal grid disposed on the transparent front contact;

removing the substrate and the electrically conductive material using exfoliation, exposing a backside surface of the solar cell;

after the substrate and the electrically conductive material have been removed, depositing a high work function material onto the back side surface of the solar cell; and

after the high work function material has been deposited onto the back side surface of the solar cell, depositing a back contact onto the high work function material.

2. The method of claim 1 , wherein the absorber comprises copper, zinc, tin, and at least one of sulfur and selenium.

3. The method of claim 1 , wherein the absorber has a thickness of from about 0.5 μm to about 2 μm, and ranges therebetween.

4. The method of claim 1 , wherein the high work function material comprises molybdenum dioxide.

5. The method of claim 1 , wherein the back contact comprises a metal selected from the group consisting of: gold, platinum, silver, and combinations thereof.

6. The method of claim 1 , further comprising:

attaching a handle substrate to a top surface of the solar cell.

7. The method of claim 6 , wherein the handle substrate comprises a fused silica plate.

8. The method of claim 6 , wherein the handle substrate is attached to the top surface of the solar cell using an epoxy, the method further comprising:

preparing the epoxy under a vacuum to prevent formation of bubbles in the epoxy.

9. The method of claim 8 , further comprising:

spinning the epoxy in a centrifuge to remove bubbles from the epoxy.

10. The method of claim 1 , further comprising:

forming a via in the solar cell by selectively removing a portion of the solar cell down to the electrically conductive material.

11. The method of claim 10 , further comprising:

forming a patterned mask on a top surface of the solar cell; and

depositing a contact metal, through the patterned mask, into the via forming a through contact in the via.

12. The method of claim 11 , wherein the contact metal is selected from the group consisting of: nickel and aluminum.

13. The method of claim 11 further comprising:

depositing the contact metal, through the patterned mask, forming a contact pad on the transparent front contact connecting the through contact to the metal grid.

14. The method of claim 1 , further comprising:

smoothing the backside surface of the solar cell after the substrate and the electrically conductive material have been removed.

15. The method of claim 14 , wherein the smoothing is performed using a wet etch.

16. The method of claim 15 , wherein the wet etch comprises bromine methanol.

17. The method of claim 1 , wherein the transparent front contact comprises a single layer of aluminum (Al)-doped zinc oxide (ZnO) (AZO) disposed directly on the buffer layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 6, 2017
From: ANTUNEZ, PRISCILLA D.; BISHOP, DOUGLAS M.; FRACZAK, GLORIA W.; GUNAWAN, OKI; HAIGHT, RICHARD A.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 041185/0421 →
Continuity (1)
Related Publication 20180226524A1 · Aug 9, 2018