Split-gate semiconductor device with L-shaped gate
A semiconductor device having a substrate, a dielectric layer over the substrate, a first gate conductor, an inter-gate dielectric structure and a second gate conductor is disclosed. A gate dielectric structure is disposed between the first gate conductor and the dielectric layer, and may include two or more dielectric films disposed in an alternating manner. The inter-gate dielectric structure may be disposed between the first gate conductor and the second gate conductor, and may include two or more dielectric films disposed in an alternating manner. The second gate conductor is formed in an L shape such that the second gate has a relatively low aspect ratio, which allows for a reduction in spacing between adjacent gates, while maintaining the required electrical isolation between the gates and contacts that may subsequently be formed.
1. A semiconductor device, comprising:
a substrate;
a first dielectric layer disposed on the substrate;
a first gate stack disposed over the first dielectric layer comprising a first gate conductor and a gate dielectric structure disposed on the dielectric layer between the first gate conductor and the dielectric layer, wherein the gate dielectric structure comprises a dielectric charge-trapping layer;
a second gate conductor disposed over the first dielectric layer, wherein the second gate conductor is configured as an L shape and wherein a vertical portion of the second gate conductor is adjacent to the first gate stack and a horizontal portion of the second gate conductor is on an opposite side of the second gate conductor from the first gate stack; and
an inter-gate dielectric structure disposed between the first gate conductor and the second gate conductor,
wherein the first gate conductor is configured to be a memory gate and the second gate conductor is configured to be a select gate of a memory cell.
2. The semiconductor device of claim 1 , wherein the first gate conductor comprises polysilicon.
3. The semiconductor device of claim 1 , wherein the gate dielectric structure comprises one or more alternating layers of oxide and nitride dielectric films.
4. The semiconductor device of claim 1 , wherein the inter-gate dielectric structure comprises two or more dielectric films disposed in alternating layers.
5. The semiconductor device of claim 1 , wherein the second gate conductor comprises polysilicon.
6. The semiconductor device of claim 1 , further comprising a first doped region in the substrate adjacent to the horizontal portion of the second gate conductor and a second doped region in the substrate adjacent to the opposite side of the first gate stack from the second gate conductor.
7. The semiconductor device of claim 1 , further comprising a first spacer disposed on a sidewall of the horizontal portion of the second gate conductor and a second spacer disposed on a sidewall of an opposite side of the first gate stack from the second gate conductor.
8. The semiconductor device of claim 6 , further comprising a contact electrically coupled to the first doped region.
9. The semiconductor device of claim 8 , further comprising an insulating material disposed over the substrate and between the second gate conductor and the contact, wherein the insulating material comprises no voids.
10. The semiconductor device of claim 9 , wherein the insulating material comprises oxide.
11. A memory array, comprising:
a substrate;
a first dielectric layer disposed over the substrate; and
at least two memory devices, each comprising:
a first gate stack disposed over the first dielectric layer comprising a first gate conductor and a gate dielectric structure disposed between the first gate conductor and the first dielectric layer;
a second gate conductor disposed over the first dielectric layer, wherein the second gate conductor is configured as an L shape and wherein a vertical portion of the second gate conductor is adjacent to the first gate stack and a horizontal portion of the second gate conductor is on an opposite side of the second gate conductor from the first gate stack; and
an inter-gate dielectric structure disposed between the first gate conductor and the second gate conductor;
a spacer disposed on a sidewall of the horizontal portion of the second gate conductor and on a sidewall of an opposite side of the first gate stack from the second gate conductor;
a doped region in the substrate adjacent to the opposite side of the first gate stack from the second gate conductor;
a contact electrically coupled to the doped region; and
an insulating material disposed over the substrate between the contact and the spacer on the sidewall of the first gate stack,
wherein the insulating material comprises no voids,
wherein a first memory device and a second memory device are disposed such that the horizontal portion of the second gate conductor of the first memory device is adjacent to the horizontal portion of the second gate conductor of the second memory device, and
wherein the first gate conductor is configured to be a memory gate and the second gate conductor is configured to be a select gate of a split gate memory cell.
12. The memory array of claim 11 , wherein the first gate conductor comprises polysilicon.
13. The memory array of claim 11 , wherein the gate dielectric structure comprises one or more alternating layers of oxide and nitride dielectric films.
14. The memory array of claim 11 , wherein the gate dielectric structure comprises a charge-trapping layer.
15. The memory array of claim 11 , wherein the inter-gate dielectric structure comprises two or more dielectric films disposed in alternating layers.
16. The memory array of claim 11 , wherein the second gate conductor comprises polysilicon.
17. The memory array of claim 11 , wherein the insulating material comprises oxide.
18. The semiconductor device of claim 1 , wherein the first gate conductor comprises a symmetric profile about an axis perpendicular to the first dielectric layer over which it is disposed.
19. The memory array of claim 11 , wherein the first gate conductor comprises a symmetric profile about an axis perpendicular to the first dielectric layer over which it is disposed.
20. A split gate memory cell, comprising:
a memory gate on a gate dielectric structure disposed over a surface of a substrate, the gate dielectric structure comprising a dielectric charge-trapping layer;
a select gate on a dielectric layer disposed on the surface of the substrate, wherein the select gate is configured as an L shape and wherein a vertical portion of select gate is adjacent to the memory gate and a horizontal portion of the select gate is on an opposite side of the select gate from the memory gate;
an inter-gate dielectric structure disposed between memory gate and the select gate;
a spacer disposed on a sidewall of the horizontal portion of the select gate and on a sidewall of an opposite side of the memory gate from the select gate; and
a doped region in the substrate adjacent to the opposite side of the memory gate from the select gate;
a contact electrically coupled to the doped region; and
an insulating material disposed over the substrate between the contact and the spacer on the sidewall of the memory gate, wherein the insulating material comprises no voids.
21. The split gate memory cell of claim 20 , wherein the gate dielectric structure comprises an oxide-nitride-oxide (ONO) stack disposed on the dielectric layer disposed on the surface of the substrate.