Seal ring for wafer level package
Devices and methods for forming a device are disclosed. At least one die is provided. A redistribution layer having a fan-out region extends concentrically outwards from an outer perimeter of the at least one die. A seal ring is disposed in the fan-out region of the redistribution layer.
1. A semiconductor device comprising:
a die;
a redistribution layer (RDL) having first and second major surfaces, wherein the first major surface includes a die region on which the die is disposed, the RDL comprises a fan-out region which includes metal lines and contacts interconnected to the die; and
a seal ring disposed in the RDL surrounding the fan-out region, wherein the seal ring comprises first and second distinct concentric seal rings surrounding the fan-out region of the RDL, the first seal ring is proximate to the fan-out region and the second seal ring is proximate to a kerf region of the device, wherein a second seal ring width W 2 of the second seal ring is larger than a first seal ring width W 1 of the first seal ring, the first seal ring comprises chamfered corners.
2. The semiconductor device of claim 1 wherein the die is embedded in a mould compound.
3. The semiconductor device of claim 2 wherein the mould compound comprises a first side and an opposing second side; and
an active surface of the die is exposed on the second side of the mould compound.
4. The semiconductor device of claim 3 wherein the seal ring comprises a third distinct concentric seal ring, the third distinct concentric seal ring is disposed proximate to the first seal ring, where W 2 is wider than a third seal ring width W 3 of the third seal ring.
5. The semiconductor device of claim 4 wherein the third seal ring comprises chamfered corners.
6. The semiconductor device of claim 4 wherein the first, second and third seal rings each comprises a continuous metal structure.
7. The semiconductor device of claim 3 wherein the second seal ring comprises chamfered corners.
8. The semiconductor device of claim 3 wherein the second and third seal rings comprise chamfered corners.
9. The semiconductor device of claim 1 wherein the RDL comprises a plurality of RDL levels, and wherein an RDL level comprises a RDL dielectric layer having a RDL via level and a RDL line level.
10. The semiconductor device of claim 1 wherein the seal ring comprises a third distinct concentric seal ring, the third seal ring is disposed between the first and second seal rings, where W 2 is wider than a third seal ring width W 3 of the third seal ring.
11. The semiconductor device of claim 10 wherein the third seal ring comprises chamfered corners.
12. The semiconductor device of claim 10 wherein the second seal ring comprises chamfered corners.
13. The semiconductor device of claim 10 wherein:
the second seal ring comprises chamfered corners; and
the third seal ring comprises chamfered corners.
14. The semiconductor device of claim 1 wherein the second seal ring comprises chamfered corners.
15. The semiconductor device of claim 1 wherein the first and second seal rings each comprises a continuous metal structure, wherein the metal structures of the first and second seal rings are arranged in parallel, and wherein each of the metal structure comprises a stack of alternately arranged trenches and vias.
16. The semiconductor device of claim 1 wherein:
each of the first and second seal rings comprises a metal structure having a plurality of metal levels;
the RDL comprises a plurality of RDL levels; and
the plurality of metal levels correspond to the plurality of RDL levels.
17. The semiconductor device of claim 16 wherein the second seal ring comprises chamfered corners.
18. The semiconductor device of claim 1 wherein the die and the seal ring are coupled to a same ground.
19. A semiconductor device comprising:
a die;
a redistribution layer (RDL) comprising a fan-out region extending concentrically outwards from an outer perimeter of the die; and
a seal ring disposed in the RDL surrounding the fan-out region, wherein the seal ring comprises an inner seal ring and an outer seal ring arranged in parallel, and wherein the inner and outer seal rings comprise chamfered corners.
20. A device comprising:
at least one die;
a redistribution layer (RDL) comprising a fan-out region extending from an outer perimeter of the at least one die; and
a seal ring disposed in the RDL surrounding the fan-out region, wherein the seal ring comprises first and second distinct concentric ring structures, wherein each ring structure comprises a continuous metal structure with chamfered corners.