Substrate processing method
There is disclosed a substrate processing method for etching a substrate on which a first and a second silicon oxide layer having different film qualities are formed side by side. The substrate processing method includes: a first etching step of supplying a halogen-containing gas that is not activated to the substrate and sublimating reaction by-products generated by reaction between the halogen-containing gas and the first and the second silicon oxide layer; and a second etching step of etching the substrate by radicals generated by activating the halogen-containing gas.
1. A substrate processing method for etching a substrate on which a first and a second silicon oxide layer having different film qualities are formed side by side, the method comprising:
a first etching step of supplying a halogen-containing gas that is not activated to the substrate and sublimating reaction by-products generated by reaction between the halogen-containing gas and the first and the second silicon oxide layer; and
a second etching step of etching the substrate by radicals generated by activating the halogen-containing gas,
wherein processing time of the first etching step and processing time of the second etching step are set such that a surface height of the first silicon oxide layer becomes equal to a surface height of the second silicon oxide layer when the first etching step and the second etching step are completed.
2. The substrate processing method of claim 1 , wherein a plasma containing the radicals passes through an ion trap member having a plurality of gas through holes and then is supplied to the substrate.
3. The substrate processing method of claim 1 , wherein the first silicon oxide layer is a thermal oxide layer obtained by heating a silicon layer under an oxidizing atmosphere.
4. The substrate processing method of claim 1 , wherein the second silicon oxide layer is a silicon oxide layer formed by reaction between a raw material gas and an oxidizing gas.
5. The substrate processing method of claim 1 , wherein a plurality of projecting walls spaced apart from each other is arranged in parallel on a surface of the substrate,
wherein the first silicon oxide layer is a thermal oxide layer obtained by heating a silicon layer under an oxidizing atmosphere and is a coating layer coated on surfaces of the projecting walls, and
wherein the second silicon layer is a silicon oxide layer formed by reaction between a raw material gas and an oxidizing gas and fills spaces between the adjacent projecting walls.
6. The substrate processing method of claim 1 , wherein the first etching step and the second etching step are performed as a separate step.
7. The substrate processing method of claim 1 , wherein the second etching step are performed after the first etching step has been completed.
8. The substrate processing method of claim 1 , wherein the first and the second silicon oxide layer are at least partially removed by the second etching step.
9. The substrate processing method of claim 1 , wherein the first etching step is performed under a condition that an etching rate of the first silicon oxide layer is lower than an etching rate of the second silicon oxide layer, and the second etching step is performed under a condition that the etching rate of the second silicon oxide layer is lower than the etching rate of the first silicon oxide layer.