IP Library › Granted Patent US 10,356,298
Granted Patent B2
US 10,356,298 · App. 15/450,697 · Granted Jul 16, 2019

Board inspection apparatus

Inventors: Nobuyuki Umemura (Aichi, JP); Akira Kato (Aichi, JP); Tsuyoshi Ohyama (Aichi, JP); Norihiko Sakaida (Aichi, JP)
Assignee: CKD Corporation
H04N5/2256G01B11/002G01N21/956G06T7/0004H04N5/247G01N2021/95638G01N2201/061G06T2207/30141
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Quick Facts
Patent No.
US 10,356,298
App. No.
15/450,697
Granted
Jul 16, 2019
Kind
B2
Abstract

A board inspection apparatus is disclosed, which includes a surface-side irradiator irradiating a surface of each inspection area of a board, a surface-side camera taking a surface-side image of the surface, a rear face-side irradiator irradiating a rear face of each inspection area, a rear face-side camera taking a rear face-side image of the rear face, and a controller moving the surface-side irradiator and the surface-side camera to a position corresponding to the surface of each inspection area, moving the rear face-side irradiator and the rear face-side camera to a position corresponding to the rear face of each inspection area, and inspecting the surface and the rear face of each inspection area based on the surface-side image and the rear face-side image, respectively.

Claims (76)

1. A board inspection apparatus comprising:

a surface-side irradiator that irradiates a surface side of each of a plurality of first inspection areas of a board;

a surface-side camera that takes a surface-side image of the surface side irradiated by the surface-side irradiator;

a rear face-side irradiator that irradiates a rear face side of each of a plurality of second inspection areas of the board;

a rear face-side camera that takes a rear face-side image of the rear face side irradiated by the rear face-side irradiator; and

a controller that:

moves the surface-side irradiator and the surface-side camera to a position corresponding to the surface side of each of the first inspection areas;

moves the rear face-side irradiator and the rear face-side camera to a position corresponding to the rear face side of each of the second inspection areas; and

inspects the surface side of each of the first inspection areas and the rear face side of each of the second inspection areas based on the surface-side image and the rear face-side image, respectively, wherein

the surface-side camera and the rear face-side camera alternately take the surface-side image and the rear face-side image,

the surface-side camera takes the surface-side image when the rear face-side irradiator stops the irradiation, and subsequently the controller moves the surface-side irradiator and the surface-side camera to a position corresponding to a surface side of a next inspection area and the rear face-side camera takes the rear face-side image when the surface-side irradiator stops the irradiation, or

the rear face-side camera takes the rear face-side image when the surface-side irradiator stops the irradiation, and subsequently the controller moves the rear face-side irradiator and the rear face-side camera to a position corresponding to a rear face side of a next inspection area and the surface-side camera takes the surface-side image when the rear face-side irradiator stops the irradiation,

the plurality of first inspection areas are set in advance on an upper face of the board based on a size of an imaging range of the surface-side camera, and

the plurality of second inspection areas are set in advance on a lower face of the board based on a size of an imaging range of the rear face-side camera.

2. The board inspection apparatus according to claim 1 , wherein

the rear face-side camera takes the rear face-side image during a moving time period of the surface-side irradiator and the surface-side camera, and

the surface-side camera takes the surface-side image during a moving time period of the rear face-side irradiator and the rear face-side camera.

3. The board inspection apparatus according to claim 1 , wherein

the surface-side irradiator and the surface-side camera are sequentially moved to the position corresponding to the surface side of each of the first inspection areas according to a surface-side inspection sequence, and the surface-side camera sequentially takes the surface-side image of each of the first inspection areas,

the rear face-side irradiator and the rear face-side camera are sequentially moved to the position corresponding to the rear face side of each of the second inspection areas according to a rear face-side inspection sequence, and the rear face-side camera sequentially takes the rear face-side image of each of the second inspection areas, and

the surface-side inspection sequence is set such that a moving path of the surface-side irradiator and the surface-side camera is a shortest path from a predetermined starting point and/or the rear face-side inspection sequence is set such that a moving path of the rear face-side irradiator and the rear face-side camera is a shortest path from a predetermined starting point.

4. The board inspection apparatus according to claim 2 , wherein

the surface-side irradiator and the surface-side camera are sequentially moved to the position corresponding to the surface side of each of the first inspection areas according to a surface-side inspection sequence, and the surface-side camera sequentially takes the surface-side image of each of the first inspection areas,

the rear face-side irradiator and the rear face-side camera are sequentially moved to the position corresponding to the rear face side of each of the second inspection areas according to a rear face-side inspection sequence, and the rear face-side camera sequentially takes the rear face-side image of each of the second inspection areas, and

the surface-side inspection sequence is set such that a moving path of the surface-side irradiator and the surface-side camera is a shortest path from a predetermined starting point and/or the rear face-side inspection sequence is set such that a moving path of the rear face-side irradiator and the rear face-side camera is a shortest path from a predetermined starting point.

5. The board inspection apparatus according to claim 1 , wherein

at least one surface-side object for positioning is provided on a surface of the board, and at least one rear face-side object for positioning is provided on a rear face of the board,

after imaging the at least one surface-side object, the surface-side camera sequentially takes the surface-side image of each of the first inspection areas, and

after imaging the at least one rear face-side object, the rear face-side camera sequentially takes the rear face-side image of each of the second inspection areas.

6. The board inspection apparatus according to claim 2 , wherein

at least one surface-side object for positioning is provided on a surface of the board, and at least one rear face-side object for positioning is provided on a rear face of the board,

after imaging the at least one surface-side object, the surface-side camera sequentially takes the surface-side image of each of the first inspection areas, and

after imaging the at least one rear face-side object, the rear face-side camera sequentially takes the rear face-side image of each of the second inspection areas.

7. The board inspection apparatus according to claim 3 , wherein

at least one surface-side object for positioning is provided on a surface of the board, and at least one rear face-side object for positioning is provided on a rear face of the board,

after imaging the at least one surface-side object, the surface-side camera sequentially takes the surface-side image of each of the first inspection areas, and

after imaging the at least one rear face-side object, the rear face-side camera sequentially takes the rear face-side image of each of the second inspection areas.

8. The board inspection apparatus according to claim 4 , wherein

at least one surface-side object for positioning is provided on a surface of the board, and at least one rear face-side object for positioning is provided on a rear face of the board,

after imaging the at least one surface-side object, the surface-side camera sequentially takes the surface-side image of each of the first inspection areas, and

after imaging the at least one rear face-side object, the rear face-side camera sequentially takes the rear face-side image of each of the second inspection areas.

9. The board inspection apparatus according to claim 5 , wherein

an inspection area in a shortest distance from the surface-side object imaged last is set as an inspection area for which the surface-side camera takes the surface-side image first, and/or

an inspection area in a shortest distance from the rear face-side object imaged last is set as an inspection area for which the rear face-side camera takes the rear face-side image first.

10. The board inspection apparatus according to claim 6 , wherein

an inspection area in a shortest distance from the surface-side object imaged last is set as an inspection area for which the surface-side camera takes the surface-side image first, and/or

an inspection area in a shortest distance from the rear face-side object imaged last is set as an inspection area for which the rear face-side camera takes the rear face-side image first.

11. The board inspection apparatus according to claim 7 , wherein

an inspection area in a shortest distance from the surface-side object imaged last is set as an inspection area for which the surface-side camera takes the surface-side image first, and/or

an inspection area in a shortest distance from the rear face-side object imaged last is set as an inspection area for which the rear face-side camera takes the rear face-side image first.

12. The board inspection apparatus according to claim 8 , wherein

an inspection area in a shortest distance from the surface-side object imaged last is set as an inspection area for which the surface-side camera takes the surface-side image first, and/or

an inspection area in a shortest distance from the rear face-side object imaged last is set as an inspection area for which the rear face-side camera takes the rear face-side image first.

13. The board inspection apparatus according to claim 5 , further comprising

a memory that stores information about a relative positional relationship between the surface-side camera and the rear face-side camera obtained in advance, wherein

the controller corrects a relative positional relationship between the surface-side camera and the surface of the board and a relative positional relationship between the rear face-side camera and the rear face of the board based on: position information about the imaged surface-side object; position information about the imaged rear face-side object; and the stored information about the relative positional relationship between the surface-side camera and the rear face-side camera.

14. The board inspection apparatus according to claim 6 , further comprising

a memory that stores information about a relative positional relationship between the surface-side camera and the rear face-side camera obtained in advance, wherein

the controller corrects a relative positional relationship between the surface-side camera and the surface of the board and a relative positional relationship between the rear face-side camera and the rear face of the board based on: position information about the imaged surface-side object; position information about the imaged rear face-side object; and the stored information about the relative positional relationship between the surface-side camera and the rear face-side camera.

15. The board inspection apparatus according to claim 7 , further comprising

a memory that stores information about a relative positional relationship between the surface-side camera and the rear face-side camera obtained in advance, wherein

the controller corrects a relative positional relationship between the surface-side camera and the surface of the board and a relative positional relationship between the rear face-side camera and the rear face of the board based on: position information about the imaged surface-side object; position information about the imaged rear face-side object; and the stored information about the relative positional relationship between the surface-side camera and the rear face-side camera.

16. The board inspection apparatus according to claim 8 , further comprising

a memory that stores information about a relative positional relationship between the surface-side camera and the rear face-side camera obtained in advance, wherein

the controller corrects a relative positional relationship between the surface-side camera and the surface of the board and a relative positional relationship between the rear face-side camera and the rear face of the board based on: position information about the imaged surface-side object; position information about the imaged rear face-side object; and the stored information about the relative positional relationship between the surface-side camera and the rear face-side camera.

17. The board inspection apparatus according to claim 1 , wherein

at least one of the surface-side irradiator and the rear face-side irradiator emits patterned light having a light intensity distribution of a stripe shape, and

the controller performs three-dimensional measurement by a phase shift method, based on a plurality of images taken with the patterned light of different phases.

18. The board inspection apparatus according to claim 2 , wherein

at least one of the surface-side irradiator and the rear face-side irradiator emits patterned light having a light intensity distribution of a stripe shape, and

the controller performs three-dimensional measurement by a phase shift method, based on a plurality of images taken with the patterned light of different phases.

19. The board inspection apparatus according to claim 3 , wherein

at least one of the surface-side irradiator and the rear face-side irradiator emits patterned light having a light intensity distribution of a stripe shape, and

the controller performs three-dimensional measurement by a phase shift method, based on a plurality of images taken with the patterned light of different phases.

20. The board inspection apparatus according to claim 1 , wherein

the board is either a printed circuit board on which solder paste is printed or a wafer substrate on which a solder bump is formed.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 9, 2017
From: UMEMURA, NOBUYUKI; KATO, AKIRA; OHYAMA, TSUYOSHI; SAKAIDA, NORIHIKO
To: CKD CORPORATION
Reel/Frame 041531/0098 →
Priority Claims (1)
JP 2016-066092 · Mar 29, 2016 · national
Continuity (1)
Related Publication 20170289416A1 · Oct 5, 2017