Fan-out semiconductor package
View Patent ↗A fan-out semiconductor package includes: a first interconnection member having a through-hole; a semiconductor chip disposed in the through-hole and having an active surface having connection pads disposed thereon and an inactive surface; an encapsulant encapsulating at least portions of the first interconnection member and the inactive surface of the semiconductor chip; and a second interconnection member disposed on the first interconnection member and the active surface of the semiconductor chip. The first interconnection member and the second interconnection member include, respectively, redistribution layers electrically connected to the connection pads of the semiconductor chip, and the encapsulant fills spaces between walls of the through-hole and side surfaces of the semiconductor chip, and at least portions of the encapsulant extend to a space between the first interconnection member and the second interconnection member and a space between the active surface of the semiconductor chip and the second interconnection member.
1. A fan-out semiconductor package comprising:
a first interconnection member having a through-hole;
a semiconductor chip disposed in the through-hole of the first interconnection member and having an active surface having connection pads disposed thereon and an inactive surface opposing the active surface;
an encapsulant encapsulating at least portions of the first interconnection member and the inactive surface of the semiconductor chip; and
a second interconnection member, on which the first interconnection member and the active surface of the semiconductor chip are disposed, including redistribution layers electrically connected to the connection pads of the semiconductor chip,
wherein the first interconnection member includes redistribution layers electrically connected to the connection pads of the semiconductor chip through at least the redistribution layers of the second interconnection member, and
the encapsulant fills spaces between walls of the through-hole and side surfaces of the semiconductor chip, and at least portions of the encapsulant extend to a space between the first interconnection member and the second interconnection member and a space between the active surface of the semiconductor chip and the second interconnection member.
2. The fan-out semiconductor package of claim 1 , wherein in the space between the active surface of the semiconductor chip and the second interconnection member, the encapsulant only extends to an edge portion of the active surface of the semiconductor chip.
3. The fan-out semiconductor package of claim 2 , wherein a central portion of the active surface of the semiconductor chip is in contact with an insulating layer of the second interconnection member.
4. The fan-out semiconductor package of claim 1 , wherein the semiconductor chip comprises a passivation layer covering the connection pads and the active surface of the semiconductor chip and exposing at least portions of the connection pads, and
the encapsulant covers at least portions of the passivation layer in an edge portion of the active surface.
5. The fan-out semiconductor package of claim 4 , wherein the passivation layer includes a dam continuously extending along an edge of the active surface of the semiconductor chip, and
the encapsulant is in contact with the dam in the edge portion of the active surface.
6. The fan-out semiconductor package of claim 4 , wherein protrusion bumps formed on the exposed connection pads and extending onto the passivation layer are further disposed on the active surface of the semiconductor chip,
the encapsulant is in contact with the protrusion bumps in the edge portion of the active surface.
7. The fan-out semiconductor package of claim 1 , wherein in the space between the first interconnection member and the second interconnection member, the encapsulant only extends to an inner edge portion of the first interconnection member.
8. The fan-out semiconductor package of claim 7 , wherein remaining portions of the first interconnection member other than the inner edge portion of the first interconnection member are in contact with the second interconnection member.
9. The fan-out semiconductor package of claim 1 , wherein the first interconnection member further includes an insulating layer,
the redistribution layers of the first interconnection member includes a first redistribution layer protruding from and disposed on the insulating layer and in contact with the second interconnection member, and a second redistribution layer protruding from and disposed on the other surface of the insulating layer opposing one surface of the insulating layer on which the first redistribution layer is disposed, and
the encapsulant is in contact with a side surface of the first redistribution layer.
10. The fan-out semiconductor package of claim 1 , wherein the encapsulant includes an inorganic filler and an insulating resin.
11. The fan-out semiconductor package of claim 10 , further comprising a reinforcing layer disposed on the encapsulant,
wherein the reinforcing layer has an elastic modulus greater than that of the encapsulant.
12. The fan-out semiconductor package of claim 11 , wherein the reinforcing layer includes a core material, an inorganic filler, and an insulating resin.
13. The fan-out semiconductor package of claim 12 , further comprising a resin layer disposed on the reinforcing layer,
wherein the resin layer includes an inorganic filler and an insulating resin.
14. The fan-out semiconductor package of claim 13 , further comprising openings penetrating through the resin layer, the reinforcing layer, and the encapsulant, and exposing at least portions of one of the redistribution layers of the first interconnection member.
15. The fan-out semiconductor package of claim 13 , further comprising a passivation layer disposed on the second interconnection member,
wherein the passivation layer includes an inorganic filler and an insulating resin.
16. The fan-out semiconductor package of claim 15 , wherein a composition of the resin layer and a composition of the passivation layer are the same as each other.