Semiconductor device having a super junction structure

1. A semiconductor device comprising:

a semiconductor layer, having a drain region of a first conductivity type at a rear surface side;

a body region of a second conductivity type, disposed at a front surface portion of the semiconductor layer;

a source region of the first conductivity type, disposed at a front surface portion of the body region;

a gate electrode, facing the body region;

a gate insulating film, between the body region and the gate electrode;

a first pillar layer of the second conductivity type, disposed inside the semiconductor layer so as to be continuous to the body region and extending from the body region toward the rear surface of the semiconductor layer; and

a trap level region, disposed inside the semiconductor layer and containing charged particles that form a trap level; and

wherein an electric field concentration portion, where an electric field concentrates in an off state in which a channel is not formed in the body region, and the trap level region are disposed at mutually different depth positions in a depth direction of the first pillar layer, and

the electric field concentration portion is disposed at a position shallower than the trap level region in the depth direction of the first pillar layer.

2. The semiconductor device according to claim 1 , wherein the electric field concentration portion is disposed not less than 10 μm away from the trap level region in the depth direction of the first pillar layer.

3. The semiconductor device according to claim 1 , wherein the first pillar layer is divided vertically by interposing, at an intermediate portion in its depth direction, a dividing region constituted of a portion of the semiconductor layer, and

the electric field concentration portion is disposed in the dividing region.

4. The semiconductor device according to claim 3 , wherein

the first pillar layer includes a plurality of the first pillar layers aligned along the front surface of the semiconductor layer;

a second pillar layer of the first conductivity type is disposed, in the semiconductor layer, between the plurality of first pillar layers; and

charge balance of the first pillar layers and the second pillar layer is secured.

5. The semiconductor device according to claim 4 , wherein

each of the first pillar layers has a width of 2 μm to 6 μm and an impurity concentration of 3×10 15 cm −3 to 8×10 15 cm −3 , and

the second pillar layer has a width of 2 μm to 10 μm and an impurity concentration of 1×10 15 cm −3 to 3×10 15 cm −3 .

6. The semiconductor device according to claim 1 , wherein the charged particles include any of protons, deuterium, 3 He++, and 4 He++.

7. The semiconductor device according to claim 1 , wherein the first pillar layer is formed in a stripe shape.

8. The semiconductor device according to claim 1 , further comprising a collector region of the second conductivity type, disposed selectively at the rear surface of the semiconductor layer.

9. The semiconductor device according to claim 1 , wherein the gate electrode includes a planar gate electrode.

10. The semiconductor device according to claim 1 , wherein the gate electrode includes a trench gate electrode.

11. A semiconductor device comprising:

a semiconductor layer, having a drain region of a first conductivity type at a rear surface side;

a body region of a second conductivity type, disposed at a front surface portion of the semiconductor layer;

a source region of the first conductivity type, disposed at a front surface portion of the body region;

a gate electrode, facing the body region;

a gate insulating film, between the body region and the gate electrode;

a first pillar layer of the second conductivity type, disposed inside the semiconductor layer so as to be continuous to the body region and extending from the body region toward the rear surface of the semiconductor layer; and

a trap level region, disposed inside the semiconductor layer and containing charged particles that form a trap level; and

wherein an electric field concentration portion, where an electric field concentrates in an off state in which a channel is not formed in the body region, and the trap level region are disposed at mutually different depth positions in a depth direction of the first pillar layer,

the first pillar layer is divided vertically by interposing, at an intermediate portion in its depth direction, a dividing region constituted of a portion of the semiconductor layer, and

the electric field concentration portion is disposed in the dividing region.

12. A semiconductor device comprising:

a semiconductor layer, having a drain region of a first conductivity type at a rear surface side;

a body region of a second conductivity type, disposed at a front surface portion of the semiconductor layer;

a source region of the first conductivity type, disposed at a front surface portion of the body region;

a gate electrode, facing the body region;

a gate insulating film, between the body region and the gate electrode;

a first pillar layer of the second conductivity type, disposed inside the semiconductor layer so as to be continuous to the body region and extending from the body region toward the rear surface of the semiconductor layer; and

a trap level region, disposed inside the semiconductor layer and containing charged particles that form a trap level; and

wherein an electric field concentration portion, where an electric field concentrates in an off state in which a channel is not formed in the body region, and the trap level region are disposed at mutually different depth positions in a depth direction of the first pillar layer,

a center of the electric field concentration portion overlaps a connection portion between a rear surface-side end portion of the first pillar layer and the semiconductor layer in a vertical direction, and

the trap level region is away from a part of the electric field concentration portion in which most electric field is concentrated.