Integrated circuits with high voltage transistors and methods for producing the same
View Patent ↗Integrated circuits and methods of producing integrated circuits are provided. In an exemplary embodiment, an integrated circuit includes a substrate and a gate overlying the substrate. A drain is defined within the substrate, where the drain and the gate are separated by a drain distance. A source is defined within the substrate adjacent to the gate, wherein the source is divided into two or more source sections.
1. An integrated circuit comprising:
a substrate;
a gate overlying the substrate;
a drain defined within the substrate, wherein the drain and the gate are separated by a drain distance;
a source defined within the substrate adjacent to the gate, wherein the source is divided into two or more source sections;
a source gap is defined between adjacent source sections, wherein the source gap and the source sections primarily include different types of conductivity determining impurities.
2. The integrated circuit of claim 1 further comprising:
a shallow trench isolation structure positioned between the drain and the gate.
3. The integrated circuit of claim 2 wherein at least a portion of the shallow trench isolation structure that is positioned between the drain and the gate directly underlies the gate.
4. The integrated circuit of claim 1 further comprising:
a silicide block overlying the substrate between the drain and the gate.
5. The integrated circuit of claim 1 wherein the substrate comprises an SOI substrate, wherein the substrate comprises a working layer, an insulating layer underlying the working layer, and a handle layer underlying the insulating layer.
6. The integrated circuit of claim 1 further comprising:
a drift well underlying the drain and at least a portion of the gate, wherein the drift well
and the drain primarily comprise the same type of conductivity determining.
7. The integrated circuit of claim 6 further comprising:
a source well underlying the source and the at least a portion of the gate, wherein the source well and source primarily comprise different types of conductivity determining impurities.
8. The integrated circuit of claim 7 , wherein the source gap and the source well have about the same concentration of conductivity determining impurities.
9. The integrated circuit of claim 1 further comprising:
a source shallow trench isolation structure adjacent to the source such that the gate and the source shallow trench isolation structure are positioned on opposite sides of the source.
10. The integrated circuit of claim 9 wherein the gate comprises a gate extension that extends between adjacent source sections such that at least a portion of the gate extension directly overlies the source shallow trench isolation structure and a portion of the gate extension directly overlies the source gap.
11. The integrated circuit of claim 1 wherein the gate comprises a gate body and a gate extension protruding from the gate body, wherein the gate body has a rectangular shape.
12. The integrated circuit of claim 1 wherein the two or more source sections comprise a total source area, the drain comprises a total drain area, and the total drain area is greater than the total source area.
13. The integrated circuit of claim 1 wherein the source gap has a lower concentration of conductivity determining impurities than the source section.
14. The integrated circuit of claim 1 wherein the gate comprises a gate extension, and wherein the source gap directly underlies the gate extension.
15. An integrated circuit comprising:
a substrate;
a source defined within the substrate, wherein the source comprises two or more source sections;
a source gap defined between adjacent source sections, wherein the source gap and the source primarily comprise different types of conductivity determining impurities;
a drain defined within the substrate;
a gate overlying the substrate between the source and the drain, wherein the gate and the drain are separated by a drain distance, and wherein the gate comprises a gate extension extending over the substrate and away from the drain, and wherein the gate extension directly overlies the source gap.
16. The integrated circuit of claim 15 further comprising a source well underlying the source sections, wherein the source well and the source sections primarily comprise different types of conductivity determining impurities.
17. The integrated circuit of claim 16 wherein the source primarily comprises “N” type conductivity determining impurities, and the source gap primarily comprises “P” type conductivity determining impurities.
18. The integrated circuit of claim 15 wherein the source comprises a conductivity determining impurity at a concentration greater than that in the source gap.
19. The integrated circuit of claim 16 wherein the source well and the source gap have about the same concentration of conductivity determining impurities.
20. A method of producing an integrated circuit comprising:
forming a gate overlying a substrate, wherein the gate comprises a gate extension;
forming a drain within the substrate, wherein a drain distance separates the drain from the gate; and
forming a source within the substrate adjacent to the gate such that the source and the drain are on opposite sides of the gate, wherein the gate extension divides the source into a plurality of source sections such that a source gap is defined between adjacent source sections, wherein the source sections and the source gap primarily include different types of conductivity determining impurities.