Manufacturing method of semiconductor device
View Patent ↗A semiconductor device and a method of manufacturing the same, the semiconductor device includes a fin shaped structure, a gate structure, an epitaxial layer, a germanium layer, an interlayer dielectric layer and a first plug. The fin shaped structure is disposed on a substrate. The gate structure is formed across the fin shaped structure. The epitaxial layer is disposed in the fin shaped structure adjacent to the gate structure. The germanium layer is disposed on the epitaxial layer. The interlayer dielectric layer covers the substrate and the fin shaped structure. The first plug is disposed in the interlayer dielectric layer to contact the germanium layer.
1. A method of forming a semiconductor device comprising:
providing a substrate having a fin shaped structure formed thereon;
forming a gate structure across the fin shaped structure;
forming a spacer surrounding the gate structure;
forming an epitaxial layer in the fin shaped structure adjacent to the gate structure;
forming an interlayer dielectric layer on the gate structure and the fin shaped structure;
forming a first opening in the interlayer dielectric layer to expose the epitaxial layer and the spacer; and
forming a germanium layer on the epitaxial layer.
2. The method of forming the semiconductor device according to claim 1 , wherein the germanium layer completely covers top surfaces of the epitaxial layer.
3. The method of forming the semiconductor device according to claim 1 , further comprising:
performing an implantation process before the forming of the germanium layer.
4. The method of forming the semiconductor device according to claim 3 , wherein the implantation process comprises implanting germanium.
5. The method of forming the semiconductor device according to claim 1 , further comprising:
forming a second opening in the interlayer dielectric layer to expose the gate structure.
6. The method of forming the semiconductor device according to claim 5 , further comprising:
forming a first plug in the first opening to contact the germanium layer; and
forming a second plug in the second opening to contact the gate structure.
7. The method of forming the semiconductor device according to claim 1 , wherein the first plug directly contacts the spacer.
8. The method of forming the semiconductor device according to claim 5 , wherein the second opening is formed after the first opening is formed.
9. The method of forming the semiconductor device according to claim 1 , further comprising:
forming a blocking pattern on the interlayer dielectric layer.
10. The method of forming the semiconductor device according to claim 9 , wherein the blocking pattern partially overlaps the first opening in a projection direction.
11. The method of forming the semiconductor device according to claim 1 , further comprising:
forming a shallow trench isolation in the substrate and surrounding the fin shaped structure.
12. The method of forming the semiconductor device according to claim 1 , wherein a portion of the germanium layer is sandwiched between the epitaxial layer and the gate structure.