Dielectric structures for nitride semiconductor devices
A dielectric structure for a nitride semiconductor device and a method of forming the same. A semiconductor device includes at least one semiconductor layer. The at least one semiconductor layer includes a gallium nitride semiconductor material. The semiconductor device also includes an oxidized layer disposed over the at least one semiconductor layer. The oxidized layer includes an oxidized form of the gallium nitride semiconductor of the at least one semiconductor layer. A silicon oxide layer is disposed over the oxidized layer. A gate is disposed over the silicon oxide layer.
1. A method of forming a semiconductor device, the method comprising:
forming a layer of polysilicon over at least one semiconductor layer, the at least one semiconductor layer including a layer of gallium nitride formed over a layer of aluminum gallium nitride or a layer of indium gallium nitride;
thermally oxidizing the layer of polysilicon to form a layer of silicon oxide; and
thermally oxidizing at least a portion of the layer of gallium nitride to form gallium oxide by introducing oxidizing species through the layer of silicon oxide to form a layer of gallium oxide over the layer of aluminum gallium nitride or the layer of indium gallium nitride.
2. The method of claim 1 , wherein thermally oxidizing the at least a portion of the layer of gallium nitride produces a gallium oxide layer positioned between the at least one semiconductor layer and the layer of silicon oxide and forms an interface with the at least one semiconductor layer.
3. The method of claim 2 , wherein thermally oxidizing the at least a portion of the layer of gallium nitride further comprises forming a layer of gallium oxide that includes beta-Ga 2 O 3 .
4. The method of claim 2 , wherein the interface has a density of interface traps of less than 5×10 12 cm 2 .
5. The method of claim 1 , wherein thermally oxidizing the layer of polysilicon is performed at a temperature of less than approximately 700° C.
6. The method of claim 5 , wherein thermally oxidizing the layer of polysilicon is further performed in a wet environment.
7. The method of claim 1 , wherein forming the layer of polysilicon comprises depositing the layer of polysilicon over the layer of gallium nitride.
8. The method of claim 1 , further comprising forming a gate over the layer of silicon oxide.
9. The method of claim 1 , further comprising forming an insulating layer over the layer of silicon oxide.
10. The method of claim 1 , wherein thermally oxidizing the at least a portion of the layer of gallium nitride occurs at a rate that depends on a thickness of the layer of silicon oxide.
11. The method of claim 1 , wherein forming the layer of polysilicon further comprises forming the layer of polysilicon by low pressure chemical vapor deposition (LPCVD).