Post treatment to reduce shunting devices for physical etching process
A method for etching a magnetic tunneling junction (MTJ) structure is described. A stack of MTJ layers is provided on a bottom electrode. A top electrode is provided on the MTJ stack. The top electrode is patterned. Thereafter, the MTJ stack not covered by the patterned top electrode is oxidized or nitridized. Then, the MTJ stack is patterned to form a MTJ device wherein any sidewall re-deposition formed on sidewalls of the MTJ device is non-conductive and wherein some of the dielectric layer remains on horizontal surfaces of the bottom electrode.
1. A method for etching a magnetic tunneling junction (MTJ) structure comprising:
providing a stack of MTJ layers on a bottom electrode wherein metal is included in at least some of said MTJ layers;
providing a top electrode on said MTJ stack;
patterning said top electrode;
thereafter oxidizing or nitridizing entire said MTJ stack not covered by patterned said top electrode thereby converting to oxide or nitride all of said MTJ stack material not covered by said patterned top electrode; and
thereafter etching said MTJ stack to form a MTJ device wherein any sidewall re-deposition formed on sidewalls of said MTJ device as a result of said etching step comes from oxidized or nitridized said MTJ stack material and is non-conductive.
2. The method according to claim 1 wherein said MTJ stack is patterned using a physical etching process.
3. The method according to claim 1 wherein said oxidizing or nitridizing is by exposing said MTJ stack to oxygen or nitrogen, respectively.
4. The method according to claim 1 wherein said oxidizing or nitridizing is by oxide or nitride plasma or ion-beam methods comprising pure O 2 or pure N 2 or O 2 or N 2 mixed with one or more noble gases.
5. The method according to claim 1 wherein said oxidizing or nitridizing is by applying water or a solvent containing oxygen or nitrogen.
6. The method according to claim 1 wherein said oxidizing or nitridizing step is not sufficient to oxidize or nitridize all of said MTJ stack not covered by patterned said top electrode and wherein said oxidizing or nitridizing step is repeated until all metal in said MTJ stack not covered by patterned said top electrode is converted to oxide or nitride.
7. The method according to claim 1 further comprising oxidizing or nitridizing said bottom electrode not covered by patterned said top electrode thereby converting to oxide or nitride all of said bottom electrode material not covered by said patterned top electrode.
8. A method for etching a magnetic tunneling junction (MTJ) structure comprising:
providing a stack of MTJ layers on a bottom electrode wherein metal is included in at least some of said MTJ layers;
providing a top electrode on said MTJ stack;
patterning said top electrode;
thereafter oxidizing or nitridizing entire said MTJ stack and said bottom electrode not covered by patterned said top electrode thereby converting to oxide or nitride all of said MTJ stack material and said bottom electrode material not covered by said patterned top electrode;
thereafter etching said MTJ stack to form a MTJ device wherein any sidewall re-deposition formed on sidewalls of said MTJ device as a result of said etching step comes from oxidized or nitridized said MTJ stack material and is non-conductive; and
thereafter patterning said bottom electrode wherein any sidewall re-deposition on sidewalls of said MTJ device comes from oxidized or nitridized said bottom electrode material and is non-conductive.
9. The method according to claim 8 wherein said MTJ stack is patterned using a physical etching process.
10. The method according to claim 8 wherein said oxidizing or nitridizing is by exposing said MTJ stack to oxygen or nitrogen, respectively.
11. The method according to claim 8 wherein said oxidizing or nitridizing is by oxide or nitride plasma or ion-beam methods comprising pure O 2 or pure N 2 or O 2 or N 2 mixed with one or more noble gases.
12. The method according to claim 8 wherein said oxidizing or nitridizing is by applying water or a solvent containing oxygen or nitrogen.
13. The method according to claim 8 wherein said oxidizing or nitridizing step is not sufficient to oxidize or nitridize all of said MTJ stack not covered by patterned said top electrode and wherein said oxidizing or nitridizing step is repeated until all metal in said MTJ stack and said bottom electrode not covered by patterned said top electrode is converted to oxide or nitride.