Plasma-enhanced anneal chamber for wafer outgassing
Implementations described herein provide for thermal substrate processing apparatus including two thermal process chambers, each defining a process volume, and a substrate support disposed within each process volume. One or more remote plasma sources may be in fluid communication with the process volumes and the remote plasma sources may be configured to deliver a plasma to the process volumes. Various arrangements of remote plasma sources and chambers are described.
1. A substrate processing apparatus, comprising:
a first thermal process chamber defining a first process volume;
a second thermal process chamber defining a second process volume;
a first remote plasma source coupled to the first thermal process chamber by a first plasma conduit configured to deliver a plasma from the first remote plasma source to a first showerhead disposed in the first process volume;
a second plasma conduit coupled between the first remote plasma source and the second process chamber, the second plasma conduit configured to deliver the plasma for the first remote plasma source to a second showerhead disposed in the second process volume;
a plasma flow controller disposed in the second plasma conduit;
a second remote plasma source coupled to the second process chamber by a third plasma conduit;
an exhaust coupled to the first thermal process chamber by a first exhaust conduit and to the second thermal process chamber by a second exhaust conduit;
a common exhaust conduit coupling the first exhaust conduit and the second exhaust conduit to the exhaust;
a total exhaust flow controller disposed in the common exhaust conduit; and
a chamber exhaust flow controller disposed in the first exhaust conduit.
2. The apparatus of claim 1 , further comprising a first pressure sensor disposed in the first thermal process chamber and a second pressure sensor disposed in the second thermal process chamber.
3. The apparatus of claim 2 , further comprising a controller coupled to the first and second pressure sensors and the total exhaust flow controller and the chamber exhaust flow controller.
4. The apparatus of claim 1 , further comprising a plasma flow controller disposed in the first plasma conduit.
5. The apparatus of claim 4 , wherein a first gas source is coupled to the first plasma source by a first source conduit, a second gas source is coupled to the second plasma source by a second source conduit, a first source flow controller is disposed in the first source conduit, and a second source flow controller is disposed in the second source conduit.
6. The apparatus of claim 5 further comprising a first composition sensor disposed in the first thermal processing chamber and a second composition sensor disposed in the second thermal processing chamber.
7. The apparatus of claim 6 , wherein the controller is also coupled to the plasma flow controller, the first source flow controller, the second source flow controller, the first composition sensor, and the second composition sensor.
8. A substrate processing apparatus, comprising:
a first thermal process chamber defining a first process volume;
a second thermal process chamber defining a second process volume;
a first remote plasma source coupled to the first thermal process chamber by a first plasma conduit configured to delive a plasma from the first remote plasma source to a first showerhead disposed in the first process volume;
a second plasma conduit coupled between the first remote plasma source and the second process chamber, the second plasma conduit configured to deliver the plasma from the first remote plasma source to a second showerhead disposed in the second process volume;
a plasma flow controller disposed in the second plasma conduit;
a second remote plasma source coupled to the second process chamber by a third plasma counduit configured to deliver a plasma from the second remote plasma source to the second showerhead;
a fourth plasma conduit coupled between the second remote plasma source and the first process chamber, the fourth plasma counduit configured to deliver the plasma from the second remote plasma source to the first showerhead;
an exhaust coupled to the first thermal process chamber by a first exhaust conduit and to the second thermal process chamber by a second exhaust conduit;
a common exhaust conduit coupling the first exhaust conduit and the second exhaust conduit to the exhaust;
a total exhaust flow controller disposed in the common exhaust conduit;
a chamber exhaust flow controller disposed in the first exhaust conduit;
a first pressure sensor disposed in the first thermal process chamber;
a second pressure sensor disposed in the second thermal process chamber.
9. The apparatus of claim 8 , further comprising a controller coupled to the total exhaust flow controller, the chamber exhaust flow controller, the first pressure sensor, and the second pressure sensor.
10. The apparatus of claim 9 , further comprising a first composition sensor disposed in the first thermal processing chamber and a second composition sensor disposed in the second thermal processing chamber, wherein the controller is further coupled to the first and second composition sensors.
11. The apparatus of claim 9 , further comprising a plasma flow controller disposed in the first plasma conduit.
12. The apparatus of claim 11 , wherein the controller is also coupled to the plasma flow controllers in the first plasma conduit and second plasma conduit.