Multi-axis accelerometer with reduced stress sensitivity
View Patent ↗Implementations of an accelerometer component may include: a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass including a first plurality of electrodes. Implementations may include a second Z proof mass rotatable about the first axis and coupled to the anchor, the second Z proof mass including a second plurality of electrodes. An X-axis accelerometer subcomponent may be located within a perimeter of the first Z proof mass, and a Y-axis accelerometer subcomponent may be located within a perimeter of the second Z proof mass. The first plurality of electrodes and the second plurality of electrodes may be symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.
1. An accelerometer component comprising:
a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass comprising a first plurality of electrodes;
a second Z proof mass independently rotatable about the first axis from the first Z proof mass and coupled to the anchor, the second Z proof mass comprising a second plurality of electrodes;
an X-axis accelerometer subcomponent located within a perimeter of the first Z proof mass; and
a Y-axis accelerometer subcomponent located within a perimeter of the second Z proof mass;
wherein the first plurality of electrodes and the second plurality of electrodes are symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.
2. The component of claim 1 , wherein the X-axis accelerometer subcomponent is not directly mechanically coupled with the first Z proof mass.
3. The component of claim 1 , wherein the Y-axis accelerometer subcomponent is not directly mechanically coupled with the second Z proof mass.
4. The component of claim 1 , wherein each electrode of the first plurality of electrodes is larger in size than each electrode of the second plurality of electrodes.
5. The component of claim 1 , wherein the first plurality of electrodes of the first Z proof mass comprises two electrodes.
6. The component of claim 1 , wherein the second plurality of electrodes of the second Z proof mass comprises four electrodes.
7. The component of claim 1 , wherein the first Z proof mass and the second Z proof mass rotate in opposite directions with respect to each other when accelerating.
8. The component of claim 1 , wherein the X-axis accelerometer subcomponent comprises two electrode anchors located symmetrically with respect to each other on either side of an X proof mass anchor.
9. The component of claim 1 , wherein the Y-axis accelerometer subcomponent comprises two electrode anchors located symmetrically with respect to each other on either side of a Y proof mass anchor.
10. An accelerometer component comprising:
a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass comprising a first pair of electrodes;
a second Z proof mass independently rotatable about the first axis from the first Z proof mass and coupled to the anchor, the second proof mass comprising a second pair of electrodes and a third pair of electrodes,
one of an X-axis accelerometer subcomponent or a Y-axis accelerometer subcomponent located within a perimeter of the first Z proof mass; and
one of an X-axis accelerometer subcomponent or a Y-axis accelerometer subcomponent located within a perimeter of the second Z proof mass;
wherein the X-axis accelerometer subcomponent comprises two electrode anchors located symmetrically with respect to each other on either side of an X proof mass anchor;
wherein the Y-axis accelerometer subcomponent comprises two electrode anchors located symmetrically with respect to each other on either side of a Y proof mass anchor; and
wherein each pair of electrodes is positioned so that each electrode pair is located symmetrically about one of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, or a fourth axis diagonal to the first axis and second axis.
11. The component of claim 10 , wherein the first pair of electrodes is between the second pair of electrodes and the third pair of electrodes.
12. The component of claim 10 , wherein the X-axis accelerometer subcomponent is not directly mechanically coupled with the first Z proof mass.
13. The component of claim 10 , wherein the Y-axis accelerometer subcomponent is not directly mechanically coupled with the second Z proof mass.
14. An accelerometer component comprising:
a first Z proof mass rotatable about a first axis and coupled to an anchor, the first proof mass comprising a first pair of electrodes;
a second Z proof mass independently rotatable about the first axis from the first Z proof mass and coupled to the anchor, the second proof mass comprising a second pair of electrodes and a third pair of electrodes; and
an X-axis accelerometer component located within a perimeter of the first Z proof mass;
wherein the first Z proof mass and the second Z proof mass are each rotatable about the anchor; and
wherein each pair of electrodes is positioned so the X-axis accelerometer component is symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.
15. The component of claim 14 , further comprising a Y-axis accelerometer component located within a perimeter of the second Z proof mass.
16. The component of claim 15 , wherein the first pair of electrodes is between the second pair of electrodes and the third pair of electrodes.