Film forming apparatus and film forming method
A film forming apparatus configured to form a film on part of a work. The film forming apparatus comprises a film forming vessel comprising a first mold located above the work and a second mold located below the work to be opposed to the first mold. The first mold is configured to include a first recessed portion that is recessed upward viewed from a film formation target part of the work and a first planar portion arranged around the first recessed portion. The second mold is configured to include a second planar portion in a place opposed to the first planar portion. The film forming apparatus also comprises a first seal member located between the first planar portion and the work. The first seal member is configured to come into contact with the first planar portion and the work when the work is away from the first planar portion. The film forming apparatus further comprises a second seal member located between the second planar portion and the work. The second seal member is configured to come into contact with the second planar portion and the work when the work is away from the second planar portion. The second seal member is provided on a lower face of the work. This configuration suppresses poor film formation when the seal member is placed between the film forming vessel and the work.
1. A film forming method of forming a film on part of a work by a film forming apparatus, the film forming apparatus comprising:
a film forming vessel comprising a first mold located above the work and a second mold located below the work to be opposed to the first mold, the first mold being configured to include a first recessed portion that is recessed upward viewed from a film formation target part of the work and a first planar portion arranged around the first recessed portion, the second mold being configured to include a second planar portion in a place opposed to the first planar portion, wherein the film forming vessel is configured to sandwich the work with the first and second molds;
a first seal member located between the first planar portion and the work, the first seal member being configured to come into contact with the first planar portion and the work with the work separated from the first planar portion; and
a second seal member located between the second planar portion and the work, the second seal member being configured to come into contact with the second planar portion and the work with the work separated from the second planar portion, wherein the second seal member is provided on a lower face of the work,
the film forming method comprising:
(a) moving the first mold upward relative to the work under condition that the first mold and the work are in contact with the first seal member and that the second mold and the work are in contact with the second seal member; and
(b) moving the work upward relative to the second mold after starting the (a).
2. The film forming method according to claim 1 ,
the film forming method performing the (b) after stopping the moving the first mold in the (a).
3. The film forming method according to claim 1 , further comprising:
(c) conveying the work out of the film forming vessel, after the (b); and
(d) cleaning the second seal member provided on the lower face of the work conveyed out of the film forming vessel, after the (c).
4. The film forming method according to claim 1 ,
wherein the film formation target part of the work is provided on an upper face side of the work; and
wherein the second mold includes a second recessed portion that is recessed downward viewed from the film formation target part of the work, the second planar portion being arranged in a place opposed to the first planar portion around the second recessed portion.