Semiconductor device and a manufacturing method thereof
A semiconductor device has a chip region including a back-side illumination type photoelectric conversion element, a mark-like appearance part, a pad electrode, and a coupling part. The mark-like appearance part includes an insulation film covering the entire side surface of a trench part formed in a semiconductor substrate. The pad electrode is arranged at a position overlapping the mark-like appearance part. The coupling part couples the pad electrode and mark-like appearance part. At least a part of the pad electrode on the other main surface side of the substrate is exposed through an opening reaching the pad electrode from the other main surface side of the substrate. The mark-like appearance part and coupling part are arranged to at least partially surround the outer circumference of the opening in plan view.
1. A semiconductor device comprising:
a semiconductor substrate having a main surface and a back surface opposite the main surface;
a first transistor formed on the main surface of the semiconductor substrate and including the photodiode for used as a photoelectric conversion element;
a plurality of interlayer insulation films formed over the main surface of the semiconductor substrate;
a plurality of metal wirings formed over the main surface of the semiconductor substrate and disposed on the interlayer insulation films;
a plurality of metal vias formed over the main surface of the semiconductor substrate and connected to the metal wirings;
a pad electrode formed over the main surface of the semiconductor substrate and disposed on the interlayer insulation films;
a trench formed in the semiconductor substrate;
a metal part formed in the trench; and
a first seal ring connected to the pad electrode and the metal part such that first seal ring is disposed between the pad electrode and the metal part;
wherein an opening is formed in the semiconductor substrate and the interlayer insulation films such that the opening penetrates through both the semiconductor substrate and the interlayer insulation films to expose a surface of the pad electrode,
wherein the first seal ring comprises a first wiring of the metal wirings and a first metal via of the metal vias and surrounds the opening, and
wherein the first seal ring disposed between the first transistor and the opening in plan view.
2. The semiconductor device according to claim 1 , further comprising
a second seal ring comprises a second wiring of the metal wirings and a second metal via of the metal vias, and disposed around the first seal ring;
wherein the pad electrode is disposed between the second seal ring and the first transistor in plan view.
3. The semiconductor device according to claim 2 , further comprising
an antireflection film formed on the back surface of the semiconductor substrate and formed of a silicon nitride film.
4. The semiconductor device according to claim 3 , further comprising;
a second transistor, for controlling the operations of the photodiodes, formed on the main surface of the semiconductor substrate and including a gate electrode, a source region; and
a light shielding film formed over the antireflection film;
wherein the light shielding film is disposed to overlap with the second transistor in a cross-sectional view.
5. The semiconductor device according to claim 4 , further comprising;
a planarization film formed over the light shielding film to cover the light shielding film, and formed of a silicon oxide film; and
a color filter formed over the planarization film to overlap with the first transistor in a cross-sectional view; and
a microlens formed over the color filter to overlap with the first transistor in a cross-sectional view.
6. The semiconductor device according to claim 4 , further comprising
a insulation film formed in the trench such that the insulation film is disposed between a side surface of the metal part and a side surface of the trench.
7. The semiconductor device according to claim 5 ,
wherein the trench penetrates from the main surface of the semiconductor substrate to the back surface of the semiconductor substrate.
8. The semiconductor device according to claim 5 ,
wherein the insulation film is disposed around the metal part such that a bottom surface of the metal part is covered with the insulation film, and
wherein the antireflection film covers the back surface of the semiconductor and a bottom surface of the insulation film.
9. The semiconductor device according to claim 5 ,
wherein the insulation film is disposed around the metal part such that a bottom surface of the metal part is covered with the insulation film, and
wherein the antireflection film covers the back surface of the semiconductor and a bottom surface of the insulation film.
10. The semiconductor device according to claim 9 ,
wherein the metal part and the insulation film are used as an alignment mark.
11. The semiconductor device according to claim 9 ,
wherein the pad electrode disposed to overlap with the the first seal ring and the trench in a cross-sectional view.
12. The semiconductor device according to claim 9 ,
wherein the first seal ring is disposed to surround all side of the opening in plan view.