Vertical flash memory and forming method thereof
A vertical flash memory includes a plurality of vertical memory cells, wherein each of the vertical memory cells includes a selective gate, a main gate, a dielectric interlayer and a vertical channel layer. The selective gate is disposed on a substrate. The main gate is stacked on the selective gate. The dielectric interlayer isolates the main gate from the selective gate. The vertical channel layer is disposed on sidewalls of the selective gate and the main gate. The present invention also provides a method of forming said vertical flash memory.
1. A vertical flash memory, comprising:
a plurality of vertical memory cells, wherein each of the vertical memory cells comprises:
a selective gate disposed on a substrate;
a main gate stacked on the selective gate;
a dielectric interlayer isolating the main gate from the selective gate;
a vertical channel layer disposed on sidewalls of the selective gate and the main gate; and
an isolation structure directly contacting a sidewall of the vertical channel layer opposite to the selective gate and the main gate.
2. The vertical flash memory according to claim 1 , further comprising:
a selective gate dielectric layer disposed between the selective gate and the vertical channel layer.
3. The vertical flash memory according to claim 2 , further comprising:
a charge trapping layer disposed between the main gate and the vertical channel layer, and the charge trapping layer stacked on the selective gate dielectric layer.
4. The vertical flash memory according to claim 3 , wherein the charge trapping layer and the selective gate dielectric layer are separated by the dielectric interlayer.
5. The vertical flash memory according to claim 1 , further comprising:
a contact directly contacting the main gate while a source line contact directly contacts the vertical channel layer and a bit line contact directly contacts a bit line contact region.
6. The vertical flash memory according to claim 5 , wherein the bit line contact region is included in the vertical channel layer, wherein the source line contact and the bit line contact are misaligned.
7. The vertical flash memory according to claim 5 , wherein the bit line contact region is beside the vertical channel layer.
8. The vertical flash memory according to claim 1 , wherein the vertical channel layer comprises a first vertical channel layer and a second vertical channel layer stacked from bottom to top.
9. The vertical flash memory according to claim 8 , wherein a top surface of the first vertical channel layer trims a top surface of the selective gate, and a top surface of the second vertical channel layer trims a top surface of the main gate.
10. The vertical flash memory according to claim 1 , wherein the isolation structure isolates the vertical memory cells from each other.
11. The vertical flash memory according to claim 10 , wherein the isolation structure comprises a bottom isolation structure and a top isolation structure stacked from bottom to top, wherein a top surface of the bottom isolation structure trims a top surface of the selective gate, and a top surface of the top isolation structure trims a top surface of the main gate.