Enhancing on-chip fluorescence detection
Apparatus for enhancing on-chip fluorescence detection. For example, an apparatus comprises a microfluidic channel, an excitation signal enhancing structure formed on a first side of the microfluidic channel and a photodetector structure formed on a second side of the microfluidic channel. For example, the excitation signal enhancing structure enhances an excitation signal and the enhanced excitation signal excites one or more samples in the microfluidic channel to emit signals at a fluorescence wavelength at a higher rate.
1. An apparatus for signal detection, comprising:
a microfluidic channel comprising a first side and a second side;
an excitation signal enhancing structure disposed within the microfluidic channel, wherein the excitation signal enhancing structure is configured to generate an enhanced excitation signal in response to receipt of an incident excitation signal comprising electromagnetic radiation, wherein the enhanced excitation signal exhibits an intensity that is higher than an intensity of the incident excitation signal; and further wherein the microfluidic channel comprises one or more samples configured to emit one or more fluorescence response signals in response to being excited by the enhanced excitation signal;
an optical filter comprising a first side and a second side, wherein the first side of the optical filter is formed on the second side of the microfluidic channel; and
a photodetector structure formed on the second side of the optical filter;
wherein the optical filter reflects the excitation signal and allows passage of a fluorescence response signal emitted by one or more samples in the microfluidic channel to the photodetector structure.
2. The apparatus of claim 1 , wherein the excitation signal enhancing structure is a plasmonic metal structure.
3. The apparatus of claim 2 , wherein the enhanced excitation signal is a resonant signal emitted by the plasmonic metal structure in response to receipt of the incident excitation signal.
4. The apparatus of claim 3 , wherein the plasmonic metal structure is a set of plasmonic metal concentric rings.
5. The apparatus of claim 4 , wherein at least one of the incident excitation signal and the resonant signal is focused toward a center of the set of plasmonic metal concentric rings.
6. The apparatus of claim 5 , further comprising a sample stopper formed through the microfluidic channel, wherein the sample stopper is operative to increase sample concentration of the one or more samples in a vicinity of the sample stopper.
7. The apparatus of claim 1 , wherein the excitation signal enhancing structure is a set of dielectric concentric rings and wherein the incident excitation signal is focused toward a center of the set of dielectric concentric rings.
8. The apparatus of claim 7 , wherein the dielectric concentric rings comprise silicon nitride or aluminum oxide.
9. The apparatus of claim 1 , further comprising a glass substrate on a second side of the microfluidic channel.
10. A method for forming a signal detection apparatus comprising:
forming a microfluidic channel comprising a first side and a second side;
forming an optical filter comprising a first side and a second side, wherein the first side of the optical filter is formed on the second side of the microfluidic channel;
forming a photodetector structure on the second side of the optical filter; and
forming an excitation signal enhancing structure within the microfluidic channel;
wherein the excitation signal enhancing structure is configured to generate an enhanced excitation signal in response to receipt of an incident excitation signal comprising electromagnetic radiation, and wherein the enhanced excitation signal exhibits an intensity that is higher than an intensity of the incident excitation signal;
wherein the microfluidic channel comprises one or more samples configured to emit one or more fluorescence response signals in response to being excited by the enhanced excitation signal; and
wherein the optical filter reflects the excitation signal and allows passage of a fluorescence response signal emitted by one or more samples in the microfluidic channel to the photodetector structure.
11. The method of claim 10 , wherein the excitation signal enhancing structure is a plasmonic metal structure.
12. The method of claim 11 , wherein the enhanced excitation signal is a resonant signal emitted by the plasmonic metal structure in response to receipt of the incident excitation signal.
13. The method of claim 12 , wherein the plasmonic metal structure is a set of plasmonic metal concentric rings.
14. The method of claim 13 , wherein at least one of the incident excitation signal and the resonant signal is focused toward a center of the set of plasmonic metal concentric rings.
15. The method of claim 10 , wherein the excitation signal enhancing structure is a set of dielectric concentric rings, and wherein the incident excitation signal is focused toward a center of the set of dielectric concentric rings.
16. The method of claim 15 , wherein the dielectric concentric rings comprise silicon nitride or aluminum oxide.
17. An integrated circuit for signal detection, comprising:
a microfluidic channel comprising a first side and a second side;
an excitation signal enhancing structure disposed within the microfluidic channel, wherein the excitation signal enhancing structure is configured to generate an enhanced excitation signal in response to receipt of an incident excitation signal comprising electromagnetic radiation, wherein the enhanced excitation signal exhibits an intensity that is higher than an intensity of the incident excitation signal; and further wherein the microfluidic channel comprises one or more samples configured to emit one or more fluorescence response signals in response to being excited by the enhanced excitation signal;
an optical filter comprising a first side and a side second, wherein the first side of the optical filter is formed on the second side of the microfluidic channel;
a photodetector structure comprising a first side and a second side, wherein the first side of the photodetector structure is formed on the second side of the optical filter; and
a silicon substrate formed on the second side of the photodetector structure;
wherein the optical filter reflects the excitation signal and allows passage of a fluorescence response signal emitted by one or more samples in the microfluidic channel to the photodetector structure.
18. The integrated circuit of claim 17 , wherein the excitation signal enhancing structure is a set of dielectric concentric rings, and wherein the incident excitation signal is focused toward a center of the set of dielectric concentric rings.
19. The integrated circuit of claim 17 , wherein the excitation signal enhancing structure is a plasmonic metal structure.
20. The integrated circuit of claim 19 , wherein the enhanced excitation signal is a resonant signal emitted by the plasmonic metal structure in response to receipt of the incident excitation signal.