Silicon carbide EPI wafer and method for manufacturing same
An embodiment provides: a method for manufacturing a silicon carbide epi wafer, the method comprising the steps of preparing a wafer, applying a reaction gas to the wafer, heating the reaction gas to generate an intermediate compound, and forming a silicon carbide epi layer on the wafer using the generated intermediate compound, wherein the reaction gas contains a plurality of hydrocarbon compounds; and a silicon carbide epi wafer comprising a silicon carbide epi layer formed by a reaction gas containing a plurality of hydrocarbon compounds, wherein the C/Si value of the silicon carbide epi layer is uniform on the wafer, and thus the uniformity of the silicon carbide epi layer on the wafer can be improved.
1. A silicon carbide epi wafer comprising a silicon carbide epi layer formed from a reactive gas comprising a plurality of hydrocarbon compounds,
wherein the plurality of hydrocarbon compounds have different thermal decomposition degrees,
wherein at least one of the plurality of hydrocarbon compounds has a different deposition ratio from the rest of the plurality of hydrocarbon compounds depending on a distance between the wafer and a gas source,
wherein a ratio of a thickness difference of the silicon carbide epi layer between different areas of the wafer with respect to an average thickness of the silicon carbide epi layer disposed on the wafer is 0.005 or less, and
wherein the silicon carbide epi layer disposed on the wafer has a root mean square (RMS) roughness of 0.5 nm or less.
2. The silicon carbide epi wafer according to claim 1 , wherein the hydrocarbon compounds comprise C 3 H 8 , C 2 H 4 , C 2 H 2 and CH 4 .
3. The silicon carbide epi wafer according to claim 2 , wherein C 3 H 8 is thermally decomposed into C 2 H 4 , C 3 H 6 or C 2 H 6 .
4. The silicon carbide epi wafer according to claim 3 , wherein C 2 H 4 has a higher deposition ratio than C 3 H 8 when the distance between the wafer and the gas source is 100 mm or less.
5. The silicon carbide epi wafer according to claim 2 , wherein CH 4 has a higher deposition ratio than C 3 H 8 when the distance between the wafer and the gas source is greater than 100 mm.
6. A method of manufacturing a silicon carbide epi wafer comprising:
preparing a wafer;
applying a reactive gas to the wafer;
heating the reactive gas to prepare an intermediate compound; and
growing the prepared intermediate compound into a silicon carbide epi layer on the wafer,
wherein the reactive gas comprises a plurality of hydrocarbon compounds,
wherein the plurality of hydrocarbon compounds are determined based on a distance from a point where the reactive gas is supplied to the wafer,
wherein when the distance is 100 mm or less, the hydrocarbon compounds comprise C 2 H 8 , and C 2 H 2 or C 2 H 4 and a weight ratio of C 3 H 8 to C 2 H 2 or C 2 H 4 is 1:0.1 to 1:0.3;
wherein when the distance is greater than 100 mm and is equal to or less than 150 mm, the hydrocarbon compounds comprise C 3 H 8 , C 2 H 2 or CH 4 , and a weight ratio of C 3 H 8 to C 2 H 2 or C 2 H 4 to CH 4 is 1:0.1 to 0.3:0.2 to 0.4; and
wherein when the distance is greater than 150 mm. the hydrocarbon compounds comprise C 3 H 8 , C 2 H 2 or C 2 H 4 , and CH 4 , and the weight ratio of C 3 H 8 to C 2 H 2 or C 2 H 4 to CH 4 is 1:0.1 to 0.3:0.2 to 0.6.
7. The method according to claim 6 , wherein the hydrocarbon compounds have different thermal decomposition degrees.