IP Library › Granted Patent US 10,550,947

Granted Patent B2

US 10,550,947 · App. 15/520,607 · Granted Feb 4, 2020

Block valve and block valve for raw material container

Inventor: Goki Koyama (Tokyo, JP)

Assignee: KITZ SCT CORPORATION

F16K11/22 F16K1/36 F16K7/16 F16K27/003 F16K27/0236 F16K41/00 F16K49/00

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Quick Facts

Patent No.: US 10,550,947
App. No.: 15/520,607
Granted: Feb 4, 2020
Kind: B2

External Links

USPTO Patent Center↗ Full Patent PDF↗

Abstract

A block valve and a block valve for a raw material container having a structure in which a retaining part of a liquid material or cleaning fluid is not present inside. In the block valve, a first side of a main flow path in communication with a supply route of a block body and a first minimal port part of a first diaphragm valve in a tilted state with respect to the block body are connected, a second side of the main flow path and a second minimal port part of a second diaphragm valve are connected, a port opening of the second diaphragm valve is in communication with a supply port part, and a joint port part of the first diaphragm valve and a connection line in a vertical direction are connected by a communication path.

Claims (68)

1. A block valve comprising:

a block body;

a first diaphragm valve;

a second diaphragm valve;

a supply port part;

a connection line;

a substantially horizontal main flow path;

a supply route; and

a communication path,

wherein:

the substantially horizontal main flow path is in communication with the supply route;

the supply route extends gravitationally upward from the block body;

a center axis of the first diaphragm valve is tilted with respect to a substantially gravitational direction;

the first diaphragm valve includes a first diaphragm in a casing thereof, a first minimal port part, a first actuation mechanism, a first suspension pressing seat member, a first seat part, and a joint port part;

the second diaphragm valve has a second diaphragm in a casing thereof, a second minimal port part, a second actuation mechanism, a second suspension pressing seat member, a second seat part, and a port opening;

the first minimal port part is connected to a first side of the substantially horizontal main flow path;

the second minimal port part is connected to a second side of the substantially horizontal main flow path;

the first actuation mechanism is configured to actuate the first diaphragm;

the second actuation mechanism is configured to actuate the second diaphragm;

the first seat part consists of a first smooth surface configured to make a seal contact with a first annular projecting part of the first suspension pressing seat member;

the second seat part consists of a second smooth surface configured to make a seal contact with a second annular projecting part of the second suspension pressing seat member;

the first seat part is provided to a valve opening of the first minimal port part;

the second seat part is provided to a valve opening of the second minimal port part;

the first seat part opposes the first suspension pressing seat member;

the second seat part opposes the second suspension pressing seat member;

the port opening and the supply port part are in communication;

the connection line extends gravitationally downward from the block body and is configured to be connected to a raw material container;

the joint port part and the connection line are connected by the communication path;

a center axis of the communication path is tilted with respect to the substantially gravitational direction;

the supply port part is at a lowermost part of the block body and is in communication with the port opening at a position which is lower than the second seat part;

the joint port part is below the first minimal port part and at a lowermost position in the first diaphragm valve; and

the block valve is configured to, in a purge process, stop a supply of a carrier gas to the raw material container and set the first diaphragm valve in a closed state.

2. The block valve according to claim 1 , further comprising a heater in the block body.

3. The block valve according to claim 2 , wherein the heater is configured to remove a material configured to wet a wall surface of the substantially horizontal main flow path and an oxidation source attached by atmospheric exposure by heating.

4. A block valve for a raw material container, the block valve comprising:

a block body;

a tank gate valve which is a first diaphragm valve;

a purge gas introduction automatic valve which is a second diaphragm valve;

a purge gas in-port part which is a purge gas supply port part;

a liquid-phase flow path which is a connection line;

a substantially horizontal main flow path;

a purge gas out-port which is a supply route;

a communication path,

wherein:

the substantially horizontal main flow path is in communication with the purge gas out-port;

the purge gas out-port extends gravitationally upward from the block body;

a center axis of the tank gate valve is tilted with respect to a substantially gravitational direction;

the tank gate valve includes a first diaphragm in a casing thereof, a first minimal port part, a first actuation mechanism, a first suspension pressing seat member, a first seat part, and a joint port part;

the purge gas introduction automatic valve has a second diaphragm in a casing thereof, a second minimal port part, a second actuation mechanism, a second suspension pressing seat member, a second seat part, and a port opening;