Transferring method, manufacturing method, device and electronic apparatus of micro-LED
The present invention discloses a transferring method, a manufacturing method, a device and an electronic apparatus of micro-LED. The method for transferring micro-LED comprises: forming micro-LEDs on a laser-transparent original substrate; irradiating the original substrate with laser from the original substrate side to lift-off the micro-LEDs from the original substrate; bring the micro-LEDs into contact with pads preset on a receiving substrate through a contactless action.
1. A method for transferring micro Light-Emitting Diodes (micro-LEDs), comprising:
forming micro-LEDs on a laser-transparent original substrate;
irradiating the laser-transparent original substrate with laser from a laser-transparent original substrate side to lift-off the micro-LEDs from the laser-transparent original substrate; and
bringing the micro-LEDs into contact with pads preset on a receiving substrate through an action of electrostatic force applied by applying voltage to the pads, so that the micro-LEDs are dropped off onto the receiving substrate after being lifted-off from the laser-transparent original substrate.
2. The method according to claim 1 , wherein said bringing the micro-LEDs into contact with pads preset on the receiving substrate is assisted by gravity.
3. The method according to claim 1 , wherein the micro-LEDs contain magnetic substance, and said bringing the micro-LEDs into contact with pads preset on the receiving substrate is assisted by electromagnetic force.
4. The method according to claim 1 , wherein electrodes of the micro-LEDs include solder bumps and the method further comprises: bonding the solder bumps with the pads.
5. The method according to claim 1 , wherein the micro-LEDs are lateral micro-LEDs or micro-LEDs of vertical structure.
6. A method for manufacturing a micro-LED device, comprising transferring a micro-LED to a receiving substrate by using the method according to claim 1 .
7. A micro-LED device, which is manufactured by using the method according to claim 6 .