Method for producing silicon carbide single crystal and silicon carbide single crystal substrate
The present invention provides a method for producing an SiC single crystal, enabling obtaining an SiC single crystal substrate in which a screw dislocation-reduced region is ensured in a wide range, and an SiC single crystal substrate. The SiC single crystal substrate is produced using a seed crystal having an off angle in the off orientation from a {0001} plane by a production method wherein in advance of a growth main step of performing crystal growth to form a facet {0001} plane in the crystal peripheral part on the crystal end face having grown thereon the bulk silicon carbide single crystal and obtain more than 50% of the thickness of the obtained SiC single crystal, a growth sub-step of growing the crystal at a higher nitrogen concentration than in the growth main step and at a growth atmosphere pressure of 3.9 to 39.9 kPa and a seed crystal temperature of 2,100° C. to less than 2,300° C. is included.
1. A method for producing a silicon carbide single crystal, comprising placing a seed crystal composed of silicon carbide on a crucible lid body of a crucible having a crucible container body and the crucible lid body, placing a silicon carbide raw material in the crucible container body, and sublimating the silicon carbide raw material to grow a bulk silicon carbide single crystal on the seed crystal, wherein
the seed crystal has an off angle in an off orientation from a {0001} plane,
wherein in advance of a growth main step of performing crystal growth to form a facet {0001} plane in a crystal peripheral part on a crystal end face having grown thereon the bulk silicon carbide single crystal and obtain more than 50% of a thickness of the obtained SiC single crystal, said method comprises a growth sub-step of growing the crystal at (i) a higher nitrogen concentration than in the growth main step, (ii) a growth atmosphere pressure of 3.9 to 39.9 kPa, (iii) a seed crystal temperature of 2,100° C. to less than 2,300° C., and (iv) a crystal growth rate of 0.1 mm/h or less,
wherein the nitrogen concentration in the crystal in the growth sub-step is from 2×10 19 to 1×10 20 cm −3 , and
wherein in the growth main step, the nitrogen concentration in the crystal is from 1×10 18 to 1×10 20 cm −3 .
2. The method for producing a silicon carbide single crystal according to claim 1 , wherein in the growth main step, the growth atmosphere pressure is from 0.13 to 2.6 kPa, and the temperature of the seed crystal is higher than in the growth sub-step and is less than 2,400° C.
3. The method for producing a silicon carbide single crystal according to claim 1 , wherein the facet {0001} plane is formed by forming the bulk silicon carbide single crystal on the main plane of the seed crystal such that in the process of growing of a bulk silicon carbide single crystal, the growth surface comes to have a curved surface in the growth peripheral part and be made flat in the growth central part compared with the growth peripheral part.
4. The method for producing a silicon carbide single crystal according to claim 1 , wherein the bulk silicon carbide single crystal is grown in the growth sub-step until the thickness of the bulk silicon carbide single crystal increases by 1 mm or more, and structural conversion of part of the screw dislocation in the silicon carbide single crystal to a stacking fault and reduction in the screw dislocation density in a region separated from the facet {0001} plane on the crystal end face of the silicon carbide single crystal are thereby achieved in the growth sub-step.