IP Library Granted Patent US 10,276,370
Granted Patent B2
US 10,276,370 · App. 15/540,622 · Granted Apr 30, 2019

Methods for the continuous, large-scale manufacture of functional nanostructures

Inventors: Michael A. Filler (Atlanta, GA); Sven Holger Behrens (Atlanta, GA); Laurens Victor Breedveld (Atlanta, GA)
Assignee: Georgia Tech Research Corporation
H01L21/02653C23C16/045C23C16/442C23C16/4417H01L21/0262H01L21/02532H01L21/02576H01L21/02579H01L21/02603H01L21/02606H01L21/02645H01L21/02543H01L21/02546
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Quick Facts
Patent No.
US 10,276,370
App. No.
15/540,622
Granted
Apr 30, 2019
Kind
B2
Abstract

A method for forming nanostructures including introducing a hollow shell into a reactor. The hollow shell has catalyst nanoparticles exposed on its interior surface. The method also includes introducing a precursor into the reactor to grow nanostructures from the interior surface of the hollow shell from the catalyst nanoparticles.

Claims (62)

1. A method for forming nanostructures comprising:

synthesizing a hollow shell via emulsion templating, where a wall of the hollow shell includes a plurality of first particles, an interior surface of the wall includes a plurality of second particles exposed thereon, and the second particles are catalyst particles;

introducing the hollow shell into a reactor; and

introducing a precursor into the reactor to grow nanostructures inside the hollow shell from the catalyst particles.

2. The method of claim 1 , wherein the reactor comprises a fluidized bed.

3. The method of claim 1 , wherein the reactor comprises a packed bed.

4. The method of claim 1 , wherein the precursor is gaseous.

5. A method for forming nanostructures comprising:

synthesizing a hollow shell via emulsion templating, where a wall of the hollow shell includes a plurality of first particles, an interior surface of the wall includes a plurality of second particles exposed thereon, and the second particles are catalyst particles;

introducing the hollow shell into a reactor; and

introducing a precursor into the reactor to grow nanostructures inside the hollow shell from the catalyst particles;

wherein the precursor includes at least one of the following: SiH 4 , B 2 H 6 and PH 3 ; and

wherein the nanostructures include at least one of the following materials: group IV, III-V and II-VI semiconductors.

6. The method of claim 1 , wherein at least a portion of the catalyst particles contain metal.

7. The method of claim 1 , wherein at least a portion of the catalyst particles comprise at least one of the following elements: gold, tin and copper.

8. The method of claim 1 , wherein the nanostructures include at least one of the following materials: group IV, III-V and II-VI semiconductors.

9. The method of claim 1 , wherein the nanostructures have at least one of the following configurations: nanowire and nanotube.

10. The method of claim 1 , wherein at least a portion of the nanostructures have a diameter of approximately 10 to 500 nm.

11. The method of claim 1 , wherein at least a portion of the nanostructures have a diameter of approximately 20 to 200 nm.

12. The method of claim 1 , wherein at least a portion of the nanostructures have a length of approximately 0.5 to 100 μm.

13. The method of claim 1 further comprising harvesting the nanostructures from the inside of the hollow shell.

14. The method of claim 1 , wherein introducing the precursor comprises introducing a plurality of precursors into the reactor.

15. The method of claim 14 , wherein at least a portion of the plurality of precursors are introduced into the reactor at the same time.

16. The method of claim 14 , wherein at least two of the plurality of precursors are introduced into the reactor at different points in time.

17. The method of claim 1 , wherein introducing the precursor comprises:

introducing a first precursor to grow at least a portion of the nanostructures by a first portion; and

introducing a second precursor to grow at least a portion of the nanostructures by a second portion, the second precursor being different from the first precursor.

18. The method of claim 17 , wherein the first precursor contains at least SiH 4 and B 2 H 6 , and the second precursor contains at least SiH 4 and PH 3 .

19. The method of claim 1 , wherein the wall of the hollow shell defines one or more pores.

20. The method of claim 19 , wherein at least a portion of the pores define a size of approximately 0.02 to 0.5 μm.

21. The method of claim 1 , wherein the first particles comprise silica particles.

22. The method of claim 1 , wherein the hollow shell meets at least one of the following conditions: a diameter of approximately 3 to 500 μm and a wall with a thickness of approximately 0.02 to 2 μm.

23. The method of claim 1 further comprising drying the hollow shell.

24. A method for forming nanostructures comprising:

synthesizing a hollow shell via emulsion templating by:

emulsifying a first dispersion of first particles in a second dispersion of second particles to form a first emulsion, where the first particles are catalyst particles;

re-emulsifying the first emulsion to form a double emulsion; and

generating the hollow shell based on the double emulsion, where the catalyst particles are exposed on an interior surface of the hollow hell;

introducing the hollow shell into a reactor; and

introducing a precursor into the reactor to grow nanostructures inside the hollow shell from the catalyst particles.

25. The method of claim 24 further comprising drying the hollow shell.

26. The method of claim 24 , wherein the second particles are silica particles.

27. The method of claim 24 , wherein the first dispersion is an aqueous dispersion.

28. The method of claim 24 , wherein the second dispersion is a non-aqueous dispersion.

29. The method of claim 24 , wherein a continuous phase of the double emulsion is an aqueous dispersion.

30. The method of claim 24 , wherein the first emulsion is a water-in-oil emulsion.

31. The method of claim 24 , wherein the double emulsion is a water-in-oil-in-water double emulsion.

32. The method of claim 24 further comprising extracting a middle phase from the double emulsion to generate the hollow shell.

33. A method for forming nanostructures comprising:

synthesizing a hollow shell via emulsion templating by:

emulsifying a first dispersion of first particles in a second dispersion of second particles to form a first emulsion, where the first particles are catalyst particles;

re-emulsifying the first emulsion to form a double emulsion; and

extracting a middle phase from the double emulsion to generate the hollow shell, where the catalyst particles are exposed on an interior surface of the hollow shell;

introducing the hollow shell into a reactor; and

introducing a precursor into the reactor to grow nanostructures inside the hollow shell from the catalyst particles.

34. The method of claim 13 further comprising drying the hollow shell.

35. The method of claim 13 , wherein the second particles are silica particles.

36. The method of claim 13 , wherein the first dispersion is an aqueous dispersion.

37. The method of claim 13 , wherein the second dispersion is a non-aqueous dispersion.

38. The method of claim 13 , wherein a continuous phase of the double emulsion is an aqueous dispersion.

39. The method of claim 13 , wherein the first emulsion is a water-in-oil emulsion.

40. The method of claim 13 , wherein the double emulsion is a water-in-oil-in-water double emulsion.

Assignments (2)
CONFIRMATORY LICENSE Recorded Feb 15, 2019
From: GEORGIA INSTITUTE OF TECHNOLOGY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 048356/0140 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 13, 2017
From: FILLER, MICHAEL A.; BEHRENS, SVEN HOLGER; BREEDVELD, LAURENS VICTOR
To: GEORGIA TECH RESEARACH CORPORATION
Reel/Frame 043000/0308 →
Continuity (2)
Provisional Application 62097172 · Dec 29, 2014
Related Publication 20170372898A1 · Dec 28, 2017