IP Library › Granted Patent US 11,078,073
Granted Patent B2
US 11,078,073 · App. 15/551,408 · Granted Aug 3, 2021

Self-processing synthesis of hybrid nanostructures

Inventors: Roie Yerushalmi (Kfar Warburg, IL); Yossef Paltiel (Maskeret Batya, IL); Ori Pinchas-Hazut (Jerusalem, IL); Sharon Waichman (Ganey Tikva, IL); Amir Ziv (Kefar Saba, IL); Shira Yochelis (Ness Ziona, IL)
Assignee: Yissum Research Development Company of the Hebrew University of Jerusalem Ltd.
B81C1/00031B82B1/001B82Y30/00B82Y35/00B81B2203/0361
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Quick Facts
Patent No.
US 11,078,073
App. No.
15/551,408
Granted
Aug 3, 2021
Kind
B2
Abstract

Provided is a self-processing synthesis of hybrid nanostructures, novel nanostructures and uses thereof in the construction of electronic and optoelectronic devices.

Claims (29)

1. A process for patterning a nanostructure consisting of a first metal and a semiconductor material with an oxide layer on the semiconductor material, said patterning being at a metal-semiconductor junction of the first metal and the semiconductor material, wherein the first metal is in direct contact with a surface of the semiconductor material, and wherein a portion of the semi-conductor material with the oxide layer thereon is at a region of the nanostructure at a vicinity of the junction,

the process comprising:

contacting said nanostructure in solution with a processing solution comprising at least one etchant, at least one reducing agent and at least one metal source of a second metal, wherein said contacting of said nanostructure in solution with the processing solution comprises immersing the nanostructure in the processing solution; and

said contacting of the nanostructure causing self-processing involving selective etching of the oxide layer solely at said region at the vicinity of the junction to form an oxide-free region and selective deposition of at least one second metal from said at least one metal source of the second metal selectively at said oxide-free region,

wherein the selective etching and said surface deposition of the second metal are confined to the region at the vicinity of the junction by self-limiting reactions such that the process provides the nanostructure to have growth of the second metal confined to the region at the vicinity of the junction.

2. The process according to claim 1 , wherein first metal of the metal-semiconductor junction is Au and the second metal grown onto or at the vicinity of the junction is Cu, Au or Ag.

3. The process according to claim 1 , wherein the contacting of said nanostructure in solution with the processing solution consists of the immersing of the nanostructure in the processing solution.

4. The process according to claim 1 , wherein the metal of the metal-semiconductor junction is Au and the metal grown onto or at the vicinity of the junction is Au.

5. The process according to claim 1 , wherein the metal of the metal-semiconductor junction is Au and the metal grown onto or at the vicinity of the junction is Ag.

6. The process according to claim 1 , wherein the semiconductor material is a surface region or bulk material of a three-dimensional object.

7. The process according to claim 6 , wherein the three-dimensional object is a feature of an electronic or optoelectronic device.

8. The process according to claim 7 , wherein the object is a semiconductor nanowire.

9. The process according to claim 1 , wherein the nanostructure comprises the metal-semiconductor junction on a substrate comprising the semiconductor and the processing solution contacts the junction and the substrate.

10. A process for forming a metal region at a metal-semiconductor junction of a nanostructure, the nanostructure consisting of a semiconductor material and at least one first metal with an oxide layer on the semiconductor material, wherein a surface of the semiconductor material is decorated with the at least one first metal, wherein the first metal is in direct contact with the surface of the semiconductor material, and wherein a portion of the semi-conductor material with the oxide layer thereon is at a region of the nanostructure at a vicinity of the junction, the process comprising:

contacting the nanostructure in solution with a processing solution comprising:

at least one metal source of a second metal,

at least one reducing agent and

at least one etchant,

wherein said contacting of said nanostructure in solution with the processing solution comprises immersing the nanostructure in the processing solution, said contacting causing selective etching of an oxide layer present on the semiconductor surface of said nanostructure solely at the vicinity of the first metal to form an etched region,

subsequent reduction of the at least one metal source of the second metal to at least one second metal and surface deposition of the at least one second metal at the etched region,

wherein the selective etching and the surface deposition of the second metal are confined to the region at the vicinity of the junction by self-limiting reactions such that the process provides the nanostructure to have growth of the second metal confined to the region at the vicinity of the junction.

11. A process for patterning a nanostructure consisting of a first metal and a semiconductor material with an oxide layer on the semiconductor material, said patterning being at a metal-semiconductor junction of the first metal and the semiconductor material, wherein the first metal is in direct contact with a surface of the semiconductor material, and wherein a portion of the semi-conductor material with the oxide layer thereon is at a region of the nanostructure at a vicinity of the junction,

the process consisting of:

contacting said nanostructure in solution with a processing solution comprising:

at least one etchant,

at least one reducing agent and

at least one metal source of a second metal,

wherein said contacting of said nanostructure in solution with the processing solution is by immersing the nanostructure in the processing solution; said contacting of the nanostructure causing self-processing involving selective etching of the oxide layer at said region solely at a vicinity of the junction to form an oxide-free region and selective deposition of at least one second metal from said at least one metal source of the second metal selectively at said oxide-free region,

wherein the selective etching and said surface deposition of the second metal are confined to the region at the vicinity of the junction by self-limiting reactions.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 16, 2017
From: YERUSHALMI, ROIE; PALTIEL, YOSSEF; PINCHAS-HAZUT, ORI; WAICHMAN, SHARON; ZIV, AMIR; YOCHELIS, SHIRA
To: YISSUM RESEARCH DEVELOPMENT COMPANY OF THE HEBREW UNIVERSITY OF JERUSALEM LTD.
Reel/Frame 043306/0860 →
Continuity (3)
Provisional Application 62119445 · Feb 23, 2015
Provisional Application 62312063 · Mar 23, 2016
Related Publication 20180065842A1 · Mar 8, 2018