Sensitivity measuring device and inspection device
This sensitivity measuring device is provided with: a stage for placing a sample container; a temperature adjustment device that is provided with an upper heating body and a lower heating body, which are disposed above and below the sample container; and an image pickup device for picking up an image of the sample container, said image pickup device being provided with a lighting apparatus and an image pickup apparatus. Each of the upper heating body and the lower heating body has a structure wherein the temperature of a first region, a peripheral portion, is higher than the temperature of a second region including a center portion.
1. A sensitivity measuring device comprising:
a stage on which a sample container is mounted; a temperature adjustment device including an upper heating body and a lower heating body disposed above and below the sample container; and an image pickup device for picking up an image of the sample container, the image pickup device including a lighting apparatus and an image pickup apparatus, wherein each of the upper heating body and the lower heating body has a structure in which a temperature of a first region which is a peripheral portion is higher than a temperature of a second region including a center portion, and
within both the upper heating body and the lower heating body, the respective first region completely encloses the corresponding second region therein.
2. The sensitivity measuring device according to claim 1 , wherein the upper heating body and the lower heating body have a structure in which an amount of heat generation of the first region is larger than an amount of heat generation of the second region.
3. The sensitivity measuring device according to claim 2 , wherein at least one of the upper heating body and the lower heating body includes a linear heat generating body, and includes a structure in which an interval between adjacent linear heat generating bodies in the first region is larger than an interval between adjacent linear heat generating bodies in the second region.
4. The sensitivity measuring device according to claim 2 , wherein at least one of the upper heating body and the lower heating body includes a heat generating body, and includes a structure in which the thickness of the heat generating body in the first region is larger than the thickness of the heat generating body in the second region.
5. The sensitivity measuring device according to claim 1 , wherein at least one of the upper heating body and the lower heating body is a glass heater.
6. The sensitivity measuring device according to claim 5 , wherein the upper heating body is a glass heater, the lighting apparatus is disposed above the upper heating body, the lower heating body has a hole for the image pickup apparatus, and the image pickup apparatus is disposed below the lower heating body.
7. The sensitivity measuring device according to claim 1 , wherein the stage is an XY stage which moves the sample container in an X-axis direction and a Y-axis direction, and each of the upper heating body and the lower heating body has a planar size larger than a movement range of the XY stage.
8. The sensitivity measuring device according to claim 1 , wherein the upper heating body has a hole for the lighting apparatus, the lighting apparatus is disposed above the upper heating body, the lower heating body has a hole for the image pickup apparatus, and the image pickup apparatus is disposed below the lower heating body.
9. The sensitivity measuring device according to claim 1 , wherein at least one of the upper heating body and the lower heating body includes a plate having thermal conductivity, and a heat generating body disposed at a position corresponding to the first region of the plate.
10. The sensitivity measuring device according to claim 1 , further comprising:
an XY stage which moves the lighting apparatus and the image pickup apparatus in an X-axis direction and a Y-axis direction,
wherein the upper heating body and the lower heating body are glass heaters.
11. An inspection device comprising:
the sensitivity measuring device according to claim 1 ;
a tank which functions as a constant temperature bath of the sample container, where the temperature of the sample container is raised before entering the tank; and
a conveyor which conveys the sample container from the tank to the stage of the sensitivity measuring device.
12. A sensitivity measuring device comprising:
a stage on which a sample container is mounted;
a temperature adjustment device including an upper heating body and a lower heating body disposed above and below the sample container; and
an image pickup device for picking up an image of the sample container, the image pickup device including a lighting apparatus and an image pickup apparatus,
wherein each of the upper heating body and the lower heating body has a structure in which a temperature of a first region which is a peripheral portion is higher than a temperature of a second region including a center portion, and
the stage is an XY stage which moves the sample container in an X-axis direction and a Y-axis direction, the upper heating body is connected to the XY stage, and the lower heating body has a planar size larger than a movement range of the XY stage.