Method for forming ball in bonding wire
The present invention provides a ball forming method for forming a ball portion at a tip of a bonding wire which includes a core material mainly composed of Cu, and a coating layer mainly composed of Pd and formed over a surface of the core material, wherein the ball portion is formed in non-oxidizing atmosphere gas including hydrocarbon which is gas at room temperature and atmospheric pressure, the method being capable of improving Pd coverage on a ball surface in forming a ball at a tip of the Pd-coated Cu bonding wire.
1. A ball forming method for forming a ball portion at a tip of a bonding wire which includes a core material including Cu with a concentration of 50 at % or above, and a coating layer including Pd with a concentration of 50 at % or above and formed over a surface of the core material, the ball forming method comprising a step of forming the ball portion by heating with an arc discharge in non-oxidizing atmosphere gas including hydrocarbon which is gas at room temperature and atmospheric pressure.
2. The ball forming method according to claim 1 , wherein a carbon number of the hydrocarbon is 1 to 4.
3. The ball forming method according to claim 1 , wherein the hydrocarbon includes one or more of methane, ethane, propane, and butane.
4. The ball forming method according to claim 1 , wherein a concentration of the hydrocarbon in the non-oxidizing atmosphere gas is 0.08 to 12.50 vol %.
5. The ball forming method according to claim 4 , wherein a concentration of methane in the non-oxidizing atmosphere gas is 0.25 to 12.50 vol %.
6. The ball forming method according to claim 4 , wherein a concentration of ethane in the non-oxidizing atmosphere gas is 0.14 to 7.00 vol %.
7. The ball forming method according to claim 4 , wherein a concentration of propane in the non-oxidizing atmosphere gas is 0.10 to 5.00 vol %.
8. The ball forming method according to claim 4 , wherein a concentration of butane in the non-oxidizing atmosphere gas is 0.08 to 4.00 vol %.
9. The ball forming method according to claim 1 , wherein the non-oxidizing atmosphere gas includes hydrogen.
10. The ball forming method according to claim 9 , wherein the non-oxidizing atmosphere gas includes the hydrocarbon, the hydrogen, and a balance being made up of nitrogen and incidental impurities.
11. The ball forming method according to claim 9 , wherein a concentration of the hydrogen is 1.0 to 5.0 vol %.