Vertical tunnel field effect transistor (FET)
Among other things, one or more techniques for forming a vertical tunnel field effect transistor (FET), and a resulting vertical tunnel FET are provided herein. In an embodiment, the vertical tunnel FET is formed by forming a core over a first type substrate region, forming a second type channel shell around a circumference greater than a core circumference, forming a gate dielectric around a circumference greater than the core circumference, forming a gate electrode around a circumference greater than the core circumference, and forming a second type region over a portion of the second type channel shell, where the second type has a doping opposite a doping of the first type. In this manner, line tunneling is enabled, thus providing enhanced tunneling efficiency for a vertical tunnel FET.
1. A vertical tunnel field effect transistor (FET), comprising:
a first type shell around a core, wherein an interface is defined between the first type shell and the core;
a second type channel shell around the first type shell, the second type channel shell comprising a doping opposite a doping of the first type shell;
a gate electrode around the second type channel shell;
a gate dielectric; and
a substrate in contact with the first type shell, the second type channel shell, and the gate dielectric, wherein the gate electrode is spaced apart from the substrate by the gate dielectric.
2. The vertical tunnel FET of claim 1 , wherein the first type shell surrounds a circumference of the core.
3. The vertical tunnel FET of claim 2 , wherein the second type channel shell surrounds a circumference of the first type shell.
4. The vertical tunnel FET of claim 1 , wherein the second type channel shell surrounds a circumference of the first type shell.
5. The vertical tunnel FET of claim 1 , wherein the substrate is
a first type substrate.
6. The vertical tunnel FET of claim 1 , wherein the
gate dielectric is disposed between the second type channel shell and the gate electrode.
7. The vertical tunnel FET of claim 1 , comprising:
a barrier layer between the first type shell and the second type channel shell.
8. The vertical tunnel FET of claim 7 , wherein the barrier layer is in contact with the first type shell and the second type channel shell.
9. The vertical tunnel FET of claim 1 , comprising:
a second type region in contact with the first type shell and the second type channel shell.
10. The vertical tunnel FET of claim 9 , wherein the second type region is in contact with a sidewall of the core and a top surface of the first type shell.
11. The vertical tunnel FET of claim 9 , wherein the second type region is in contact with a top surface of the core and a top surface of the first type shell.
12. The vertical tunnel FET of claim 1 , wherein:
a sidewall of the first type shell has a length measured from a bottom surface of the first type shell to a top surface of the first type shell, and
the second type channel shell surrounds the length of the sidewall.
13. The vertical tunnel FET of claim 1 , wherein:
a sidewall of the second type channel shell has a length measured from a bottom surface of the second type channel shell to a top surface of the second type channel shell, and
the gate electrode surrounds a portion of the length of the sidewall.
14. A vertical tunnel field effect transistor (FET), comprising:
a first layer having a first type of dopant;
a second layer surrounding a circumference of the first layer and having a second type of dopant different than the first type of dopant;
a gate dielectric surrounding a circumference of the second layer;
a gate electrode surrounding a circumference of the gate dielectric; and
a substrate in contact with the first layer, the second layer, and the gate dielectric, wherein the gate electrode is spaced apart from the substrate by the gate dielectric.
15. The vertical tunnel FET of claim 14 , comprising:
a barrier layer disposed between the first layer and the second layer.
16. The vertical tunnel FET of claim 14 , comprising:
a third layer over the first layer and the second layer, wherein the third layer has the second type of dopant.
17. The vertical tunnel FET of claim 14 , comprising:
a third layer over and in contact with the first layer and the second layer, wherein the third layer has the second type of dopant.
18. The vertical tunnel FET of claim 17 , wherein the third layer is over and in contact with the gate dielectric.
19. A vertical tunnel field effect transistor (FET), comprising:
a first type shell around a core, wherein the first type shell has a first material composition and the core has a second material composition different than the first material composition;
a second type channel shell around the first type shell, the second type channel shell comprising a doping opposite a doping of the first type shell;
a gate dielectric around the second type channel shell;
a gate electrode around the gate dielectric, wherein the gate electrode overlies the gate dielectric; and
a substrate in contact with the first type shell, the second type channel shell, and the gate dielectric, wherein the gate electrode is spaced apart from the substrate by the gate dielectric.
20. The vertical tunnel FET of claim 19 , comprising:
a barrier layer disposed between the first type shell and the second type channel shell.