Method for manufacturing transistor with SiCN/SiOCN multilayer spacer
A semiconductor device and a method for manufacturing the same are provided in the present invention. The semiconductor device includes a substrate, a gate structure on the substrate and two spacers on both sidewalls of the gate structure. Each spacer comprises an inner first spacer portion made of SiCN and an outer second spacer portion made of SiOCN.
1. A method of manufacturing a semiconductor device, comprising:
providing a substrate;
forming a dummy gate structure on said substrate, wherein said dummy gate structure comprises a sacrificial gate electrode and a sacrificial gate insulating layer;
forming a SiCN film over said dummy gate structure and said substrate;
forming a SiOCN film over said SiCN film, wherein said SiCN film and said SiOCN film are multilayer films formed in the same step by atomic layer deposition, and said multilayer films have gradient concentrations of oxygen increasing from the boundary between said first spacer portion and said gate structure to the outer surface of said second spacer portion;
performing an etch process to said SiCN film and said SiOCN film to form two spacers on both sidewalls of said dummy gate structure, wherein each said spacer comprises an inner first spacer portion made of said SiCN film directly contacting said dummy gate structure and an outer second spacer portion made of said SiOCN film, and said first spacer portion is L-shaped with a vertical section between said second spacer portion and said dummy gate structure and a horizontal section between said second spacer portion and said substrate;
removing said sacrificial gate electrode; and
performing a process for removing said sacrificial gate insulating layer, wherein said process for removing said sacrificial gate insulating layer removes said vertical section of said first spacer portion concurrently.
2. The method of manufacturing a semiconductor device of claim 1 , wherein said process for removing said sacrificial gate insulating layer is a chemical oxide removal process.
3. The method of manufacturing a semiconductor device of claim 1 , wherein said process for removing said sacrificial gate insulating layer concurrently completely removes said vertical section of said first spacer portion of each said spacer.
4. The method of manufacturing a semiconductor device of claim 1 , further comprising steps of forming a gate structure after said dummy gate structure is removed, wherein said gate structure comprises a gate insulating layer, a work function layer and a metal layer.