IP Library Granted Patent US 10,580,872
Granted Patent B2
US 10,580,872 · App. 15/596,505 · Granted Mar 3, 2020

Oxide heterostructures having spatially separated electron-hole bilayers

Inventors: Chang-Beom Eom (Madison, WI); Hyungwoo Lee (Madison, WI)
Assignee: Wisconsin Alumni Research Foundation
H01L29/24H01L29/66969H01L29/778H01L29/7781
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Quick Facts
Patent No.
US 10,580,872
App. No.
15/596,505
Granted
Mar 3, 2020
Kind
B2
Abstract

Oxide heterostructures that form spatially separated electron-hole bilayers are provided. Also provided are electronic devices that incorporate the oxide heterostructures. The oxide heterostructure includes a base layer of SrTiO 3 , a polar layer of LaAlO 2 , and a non-polar layer of SrTiO 3 . Within the oxide heterostructures, a two-dimensional hole gas (2DHG) is formed at the interface between the non-polar layer and the polar layer and a two-dimensional electron gas (2DEG) is formed at the interface between the polar layer and the base layer.

Claims (25)

1. An oxide heterostructure comprising:

a base layer comprising SrTiO 3 ;

a polar layer comprising LaAlO 3 on the base layer;

a non-polar layer comprising SrTiO 3 on the polar layer, the SrTiO 3 of the non-polar layer having a lower oxygen vacancy concentration than the SrTiO 3 of the base layer,

a two-dimensional electron gas confined at an interface between the base layer and the polar layer; and

a two-dimensional hole gas confined at an interface between the polar layer and the non-polar layer, wherein the two-dimensional hole gas has a Hall hole mobility that is at least as high as the Hall electron mobility of the two-dimensional electron gas at a temperature in the range from 1 K to 50 K.

2. The heterostructure of claim 1 , wherein the SrTiO 3 of the non-polar layer has an oxygen vacancy index of no greater than 2.

3. An oxide heterostructure comprising:

a base layer comprising SrTiO 3 ;

a polar layer comprising LaAlO 3 on the base layer;

a non-polar layer comprising SrTiO 3 on the polar layer, the SrTiO 3 of the non-polar layer having a lower oxygen vacancy concentration than the SrTiO 3 of the base layer,

a two-dimensional electron gas confined at an interface between the base layer and the polar layer; and

a two-dimensional hole gas confined at an interface between the polar layer and the non-polar layer, wherein the two-dimensional hole gas has a Hall hole mobility of at least 4×10 2 cm 2 V −1 s −1 at a temperature of 20 K.

4. The heterostructure of claim 1 , wherein the polar layer has a thickness of at least 5 unit cells.

5. The heterostructure of claim 2 , wherein the polar layer has a thickness of at least 5 unit cells.

6. A transistor comprising:

the oxide heterostructure of claim 1 ;

a source electrode;

a drain electrode, wherein the source electrode and the drain electrode are in electrical communication through either the 2DEG or the 2DHG; and

a gate electrode that is configured to alter the current flowing between the source electrode and the gate electrode when a gate voltage is applied to the gate electrode.

7. The heterostructure of claim 1 , wherein the polar layer has a thickness of at least 4 unit cells.

8. The heterostructure of claim 3 , wherein the two-dimensional hole gas has a Hall hole mobility of at least 5×10 2 cm 2 V −1 s −1 s at a temperature in the range from 1 K to 10 K.

9. The heterostructure of claim 3 , wherein the SrTiO 3 of the non-polar layer has an oxygen vacancy index of no greater than 2.

10. The heterostructure of claim 3 , wherein the polar layer has a thickness of at least 5 unit cells.

11. The heterostructure of claim 10 , wherein the polar layer has a thickness of at least 5 unit cells.

Assignments (2)
CONFIRMATORY LICENSE Recorded Mar 18, 2022
From: UNIVERSITY OF WISCONSIN-MADISON
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 059441/0897 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 30, 2017
From: EOM, CHANG-BEOM; LEE, HYUNGWOO
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 042528/0016 →
Continuity (1)
Related Publication 20180337238A1 · Nov 22, 2018
Cited By (1)
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