PROBE CARD FOR MEASURING MICRO-CAPACITANCE
A probe card for measuring micro-capacitance comprises a substrate and a capacitance-to-digital converter. The substrate has a first surface and a second surface. A plurality of conductive contacts is disposed on the first surface. A plurality of probes is disposed on the second surface. The probes are electrically connected with the corresponding conductive contacts. The capacitance-to-digital converter is disposed on the first surface and electrically connected with the corresponding conductive contacts to measure at least one micro-capacitance of an analyte and convert the micro-capacitance into a digital signal. The abovementioned probe card has an advantage of low cost.
1 . A probe card for measuring micro-capacitance, comprising
a substrate having a first surface and a second surface, wherein a plurality of conductive contacts is disposed on said first surface of said substrate, and wherein a plurality of probes is disposed on said second surface of said substrate to contact a plurality of test contacts of an analyte, and wherein said probes are respectively electrically connected with corresponding said conductive contacts; and
a capacitance-to-digital converter disposed on said second surface of said substrate and electrically connected with corresponding said conductive contacts to measure at least one micro-capacitance of said analyte and convert said micro-capacitance into a digital signal.
2 . The probe card for measuring micro-capacitance according to claim 1 , wherein said substrate is a standard substrate.
3 . The probe card for measuring micro-capacitance according to claim 1 , wherein said capacitance-to-digital converter is electrically connected with corresponding said conductive contacts via a plurality of leads.
4 . The probe card for measuring micro-capacitance according to claim 3 , wherein a length of said leads is smaller than or equal to 5 cm.
5 . The probe card for measuring micro-capacitance according to claim 1 , wherein a length of an electric-conduction path between said capacitance-to-digital converter and said probes is smaller than or equal to 5 cm.
6 . The probe card for measuring micro-capacitance according to claim 1 , wherein said capacitance-to-digital converter can measure a capacitance within ±4 pF.
7 . The probe card for measuring micro-capacitance according to claim 1 , wherein said capacitance-to-digital converter can tolerate a parasitic capacitance less than 60 pF.
8 . The probe card for measuring micro-capacitance according to claim 1 , wherein said analyte is a wafer.
9 . The probe card for measuring micro-capacitance according to claim 1 , wherein said analyte is a wafer-level microelectromechanical sensor.