IP Library Granted Patent US 10,312,205
Granted Patent B2
US 10,312,205 · App. 15/606,467 · Granted Jun 4, 2019

Fan-out semiconductor package

Inventor: Youn Gyu Han (Suwon-si, KR)
Assignee: Samsung Electro-Mechanics Co., Ltd.
H01L24/05H01L21/568H01L23/367H01L24/01H01L24/02H01L24/13H01L24/19H01L2224/024H01L2224/0239H01L2224/02311H01L2224/02379H01L2224/02381H01L2224/0401H01L2224/04105H01L2224/05025H01L2224/05569H01L2224/12105H01L2224/13024H01L2224/16227H01L2224/32225H01L2224/73204H01L2924/01029H01L2924/15311H01L2924/18162
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Quick Facts
Patent No.
US 10,312,205
App. No.
15/606,467
Granted
Jun 4, 2019
Kind
B2
Abstract

A fan-out semiconductor package includes a semiconductor chip having an active surface, the active surface having a connection pad disposed thereon, and an inactive surface opposing the active surface; an encapsulant encapsulating at least a portion of the semiconductor chip; an insulating layer disposed on the active surface of the semiconductor chip; and a redistribution layer disposed on the insulating layer and electrically connected to the connection pad. The insulating layer includes a low tan delta (Df) dielectric material.

Claims (20)

1. A semiconductor package comprising:

a semiconductor chip having an active surface and an inactive surface opposing the active surface, the active surface having a connection pad disposed thereon;

an encapsulant encapsulating at least a portion of the semiconductor chip;

an insulating layer disposed on the active surface of the semiconductor chip, wherein the connection pad is disposed between the insulating layer and the inactive surface;

a redistribution layer disposed on the insulating layer and electrically connected to the connection pad; and

a heat dissipation member partially embedded in the encapsulant, disposed on a lateral portion of the semiconductor chip, and disposed on a level between the inactive surface of the semiconductor chip and the insulating layer,

wherein the heat dissipation member is electrically isolated from the redistribution layer and the connection pad of the semiconductor chip.

2. The semiconductor package of claim 1 , wherein the encapsulant exposes an upper surface of the heat dissipation member.

3. The semiconductor package of claim 2 , wherein an upper surface of the encapsulant is disposed on the same level as the upper surface of the heat dissipation member.

4. The semiconductor package of claim 3 , wherein the heat dissipation member penetrates through the encapsulant and is in contact with the insulating layer.

5. The semiconductor package of claim 1 , wherein the insulating layer comprises a dielectric material having a tan delta of 0.0001 to 0.006.

6. The semiconductor package of claim 1 , wherein a surface of the insulating layer has a surface roughness (Ra) of 0.10 μm or less, and the redistribution layer is disposed on the surface having Ra of 0.10 μm or less.

7. The semiconductor package of claim 1 , wherein the dielectric material comprises at least one of polyimide (PI), cycloolefinpolymer (COP), polyphenyleneoxide (PPO), polyphenyleneether (PPE), epoxy-cyanate ester, and liquid crystal polymer (LCP).

8. The semiconductor package of claim 1 , further comprising:

a passivation layer disposed on the insulating layer and having an opening portion exposing at least a portion of the redistribution layer;

an under-bump metal layer disposed on the opening portion of the passivation layer; and

connection terminals disposed on the under-bump metal layer and electrically connected to the redistribution layer,

wherein at least one of the connection terminals is disposed in a fan-out region.

9. The semiconductor package of claim 8 , further comprising: a surface mount technology (SMT) component disposed on a surface of the passivation layer and electrically connected to the semiconductor chip.

10. The semiconductor package of claim 1 , wherein the insulating layer comprises a first surface contacting the encapsulant and a second surface opposing the first surface, the redistribution layer comprises a first redistribution layer and a second redistribution layer disposed on the first surface and the second surface, respectively, and the first redistribution layer and the second redistribution layer are electrically connected to each other through a via passing through the insulating layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 3, 2019
From: SAMSUNG ELECTRO-MECHANICS CO., LTD.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 049350/0756 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 26, 2017
From: HAN, YOUN GYU
To: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Reel/Frame 042516/0346 →
Priority Claims (2)
KR 10-2016-0078778 · Jun 23, 2016 · national
KR 10-2016-0113001 · Sep 2, 2016 · national
Continuity (1)
Related Publication 20170373027A1 · Dec 28, 2017
Cited By (1)
US 12,494,412