Semiconductor element and fabrication method thereof
A semiconductor element has a metal protective layer and a metal oxide protective layer formed on the substrate to prevent the Si substrate surface from forming an amorphous layer; and a transition layer to reduce lattice difference between the metal oxide protective layer and the III-V-group buffer layer, thus improving crystal quality of the III-V-group buffer layer. A fabrication method can avoid formation of amorphous layers and cracks surrounding the Si substrate surface. A light-emitting diode (LED) element or a transistor element can be formed by depositing a high-quality multi-layer buffer structure via PVD and forming a GaN, InGaN or AlGaN epitaxial layer thereon.
1. A semiconductor element, comprising: a Si substrate, a multi-layer buffer structure, and an epitaxial function layer, wherein: the multi-layer buffer structure comprises a metal protective layer, a metal oxide protective layer, a transition layer, and an oxygen-doped AlN buffer layer in sequence; wherein the metal protective layer and the metal oxide protective layer are configured to prevent the Si substrate surface from forming an amorphous layer; and the transition layer is configured to reduce a lattice difference between the metal oxide protective layer and the oxygen-doped AlN buffer layer, thereby improving crystal quality of the oxygen-doped AlN buffer layer.
2. The semiconductor element according to claim 1 , wherein the metal protective layer is made of aluminum with a thickness of 1˜100 Å.
3. The semiconductor element according to claim 1 , wherein the metal oxide protective layer is made of aluminum oxide with a thickness of 1˜500 Å.
4. The semiconductor element according to claim 1 , wherein the transition layer is made of oxygen-doped AlN, with an oxygen-doping concentration of ≥1×10 19 cm.
5. The semiconductor element according to claim 1 , wherein the oxygen-doped AlN buffer layer has an oxygen-doping concentration of ≤4×10 22 cm −3 .
6. A light-emitting system comprising a plurality of semiconductor elements, each element comprising: a Si substrate, a multi-layer buffer structure, and an epitaxial function layer, wherein: the multi-layer buffer structure comprises a metal protective layer, a metal oxide protective layer, a transition layer, and an oxygen-doped AlN buffer layer in sequence; wherein the metal protective layer and the metal oxide protective layer are configured to prevent the Si substrate surface from forming an amorphous layer; and the transition layer is configured to reduce a lattice difference between the metal oxide protective layer and the oxygen-doped AlN buffer layer, thereby improving crystal quality of the oxygen-doped AlN buffer layer.
7. The system according to claim 6 , wherein the metal protective layer comprises aluminum with a thickness of 1˜100 Å.
8. The system according to claim 6 , wherein the metal oxide protective layer comprises aluminum oxide with a thickness of 1˜500 Å.
9. The system according to claim 6 , wherein the transition layer comprises oxygen-doped AlN, with an oxygen-doping concentration of ≥1×10 19 cm.
10. The system according to claim 6 , wherein the oxygen-doped AlN buffer layer has an oxygen-doping concentration of ≤4×10 22 cm −3 .
11. The system according to claim 6 , wherein each semiconductor element is fabricated by forming a multi-layer buffer structure and an epitaxial function layer on the Si substrate, wherein, the multi-layer buffer structure is formed by:
depositing a metal protective layer on the Si substrate surface via physical vapor deposition (PVD);
feeding oxygen to oxidize the upper surface of the metal protective layer, and depositing a metal oxide protective layer on the metal protective layer via PVD;
keeping feeding of oxygen and feeding nitrogen, and depositing a transition layer on the surface of the metal oxide protective layer via PVD;
stop feeding oxygen, and keeping feeding of nitrogen, and depositing the oxygen-doped AlN buffer layer on the transition layer surface via PVD to form a multi-layer buffer structure.